JPH0211555B2 - - Google Patents
Info
- Publication number
- JPH0211555B2 JPH0211555B2 JP60111112A JP11111285A JPH0211555B2 JP H0211555 B2 JPH0211555 B2 JP H0211555B2 JP 60111112 A JP60111112 A JP 60111112A JP 11111285 A JP11111285 A JP 11111285A JP H0211555 B2 JPH0211555 B2 JP H0211555B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- sintered body
- volume
- nitride sintered
- hydrogen gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 22
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 12
- 229910021426 porous silicon Inorganic materials 0.000 claims description 11
- 239000011863 silicon-based powder Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 238000005121 nitriding Methods 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000011148 porous material Substances 0.000 description 27
- 238000000034 method Methods 0.000 description 12
- 229910052581 Si3N4 Inorganic materials 0.000 description 11
- 239000000126 substance Substances 0.000 description 8
- 230000001186 cumulative effect Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 238000005245 sintering Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000000635 electron micrograph Methods 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 5
- 239000002002 slurry Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 238000000465 moulding Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 229920003115 HPC-SL Polymers 0.000 description 1
- 229920002153 Hydroxypropyl cellulose Polymers 0.000 description 1
- DKGAVHZHDRPRBM-UHFFFAOYSA-N Tert-Butanol Chemical compound CC(C)(C)O DKGAVHZHDRPRBM-UHFFFAOYSA-N 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229910002114 biscuit porcelain Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- -1 heat exchangers Substances 0.000 description 1
- 239000001863 hydroxypropyl cellulose Substances 0.000 description 1
- 235000010977 hydroxypropyl cellulose Nutrition 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 244000005700 microbiome Species 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229940062043 nitrogen 50 % Drugs 0.000 description 1
- 229940063921 nitrogen 75 % Drugs 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60111112A JPS61270273A (ja) | 1985-05-22 | 1985-05-22 | 網目状多孔質窒化硅素焼結体の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60111112A JPS61270273A (ja) | 1985-05-22 | 1985-05-22 | 網目状多孔質窒化硅素焼結体の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61270273A JPS61270273A (ja) | 1986-11-29 |
| JPH0211555B2 true JPH0211555B2 (enrdf_load_stackoverflow) | 1990-03-14 |
Family
ID=14552713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60111112A Granted JPS61270273A (ja) | 1985-05-22 | 1985-05-22 | 網目状多孔質窒化硅素焼結体の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61270273A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2949586B2 (ja) * | 1988-03-07 | 1999-09-13 | 株式会社日立製作所 | 電導材及びその製造法 |
-
1985
- 1985-05-22 JP JP60111112A patent/JPS61270273A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61270273A (ja) | 1986-11-29 |
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