JPH02113104U - - Google Patents
Info
- Publication number
- JPH02113104U JPH02113104U JP2100289U JP2100289U JPH02113104U JP H02113104 U JPH02113104 U JP H02113104U JP 2100289 U JP2100289 U JP 2100289U JP 2100289 U JP2100289 U JP 2100289U JP H02113104 U JPH02113104 U JP H02113104U
- Authority
- JP
- Japan
- Prior art keywords
- detection probe
- fine movement
- piezoelectric element
- conductive film
- element body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000523 sample Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
第１図は本考案微動機構の斜視図、第２図は本
考案微動機構の断面図、第３図は従来構造の概略
図を示したものである。 １，３４…圧電素子体、２…絶縁板、３…金属
膜、４…検出探針取付台、５…検出探針座、６…
検出探針、１１…ベース電極、１２…下部折り返
し電極、１３…面内走査用電極、１４…軸方向走
査用電極、１５…上部折り返し電極。
考案微動機構の断面図、第３図は従来構造の概略
図を示したものである。 １，３４…圧電素子体、２…絶縁板、３…金属
膜、４…検出探針取付台、５…検出探針座、６…
検出探針、１１…ベース電極、１２…下部折り返
し電極、１３…面内走査用電極、１４…軸方向走
査用電極、１５…上部折り返し電極。
Claims (1)
- 【実用新案登録請求の範囲】 圧電素子体の一端に検出探針が設けられた微動
素子機構において、 検出探針取付部の周囲をとり囲む導電膜を形成
し、この導電膜と圧電素子体に形成されたベース
電極とが接続された構成としたことを特徴とする
シールド付微動機構。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989021002U JPH0626804Y2 (ja) | 1989-02-23 | 1989-02-23 | シールド付微動機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989021002U JPH0626804Y2 (ja) | 1989-02-23 | 1989-02-23 | シールド付微動機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02113104U true JPH02113104U (ja) | 1990-09-11 |
| JPH0626804Y2 JPH0626804Y2 (ja) | 1994-07-20 |
Family
ID=31237849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989021002U Expired - Lifetime JPH0626804Y2 (ja) | 1989-02-23 | 1989-02-23 | シールド付微動機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0626804Y2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04122806A (ja) * | 1990-09-14 | 1992-04-23 | Mitsubishi Electric Corp | 原子間力顕微鏡の微動走査機構 |
| WO2013051622A1 (ja) * | 2011-10-03 | 2013-04-11 | オリンパス株式会社 | 円筒型圧電素子の製造方法、円筒型圧電素子、及び微小駆動機構 |
| CN107810335A (zh) * | 2015-04-02 | 2018-03-16 | 迪特尔·曼考 | 致动器 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64401A (en) * | 1987-05-29 | 1989-01-05 | Agency Of Ind Science & Technol | Mechanism for attaching and detaching fine adjustment element for stm |
-
1989
- 1989-02-23 JP JP1989021002U patent/JPH0626804Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS64401A (en) * | 1987-05-29 | 1989-01-05 | Agency Of Ind Science & Technol | Mechanism for attaching and detaching fine adjustment element for stm |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04122806A (ja) * | 1990-09-14 | 1992-04-23 | Mitsubishi Electric Corp | 原子間力顕微鏡の微動走査機構 |
| WO2013051622A1 (ja) * | 2011-10-03 | 2013-04-11 | オリンパス株式会社 | 円筒型圧電素子の製造方法、円筒型圧電素子、及び微小駆動機構 |
| JP2013080774A (ja) * | 2011-10-03 | 2013-05-02 | Olympus Corp | 円筒型圧電素子の製造方法、円筒型圧電素子、及び微小駆動機構 |
| CN107810335A (zh) * | 2015-04-02 | 2018-03-16 | 迪特尔·曼考 | 致动器 |
| CN107810335B (zh) * | 2015-04-02 | 2020-09-15 | 迪特尔·曼考 | 致动器 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0626804Y2 (ja) | 1994-07-20 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |