JPS64401A - Mechanism for attaching and detaching fine adjustment element for stm - Google Patents
Mechanism for attaching and detaching fine adjustment element for stmInfo
- Publication number
- JPS64401A JPS64401A JP13388487A JP13388487A JPS64401A JP S64401 A JPS64401 A JP S64401A JP 13388487 A JP13388487 A JP 13388487A JP 13388487 A JP13388487 A JP 13388487A JP S64401 A JPS64401 A JP S64401A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- fine adjustment
- adjustment element
- terminals
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
PURPOSE: To enable the smooth continuation of measurement without spending labor in exchanging a probe by previously setting the probe exactly to a fine adjustment element and exchanging the probe together with the fine adjustment element through one action.
CONSTITUTION: Terminals 31, 32, 33, 34 are connected to the driving electrode of the fine adjustment element 1 mounted with the probe 2. On the other hand, terminals 71, 72, 73, 74 having a spring characteristic are provided to a fine adjustment element holder 6 and the element 1 is held while said terminals are brought into contact with the terminals 31, 32, 33, 34. The terminal 35 connected to the probe 2 of the element 1 comes into contact with the terminal 75 of the holder 6 and a groove 5 for positioning the element 1 engages a positioning projection 8 of the holder 6. The exchange of the probe 2 together with the element 1 through one action is enabled when the exchange of the probe is needed if the mechanism is constituted in such a manner and the holder 6 is mounted on an STM device.
COPYRIGHT: (C)1989,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13388487A JPS64401A (en) | 1987-05-29 | 1987-05-29 | Mechanism for attaching and detaching fine adjustment element for stm |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13388487A JPS64401A (en) | 1987-05-29 | 1987-05-29 | Mechanism for attaching and detaching fine adjustment element for stm |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01401A JPH01401A (en) | 1989-01-05 |
JPS64401A true JPS64401A (en) | 1989-01-05 |
Family
ID=15115340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13388487A Pending JPS64401A (en) | 1987-05-29 | 1987-05-29 | Mechanism for attaching and detaching fine adjustment element for stm |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS64401A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02113104U (en) * | 1989-02-23 | 1990-09-11 | ||
JPH0312506A (en) * | 1989-06-09 | 1991-01-21 | Jeol Ltd | Scan image output system of scanning tunneling microscope |
EP0871006A1 (en) * | 1997-04-09 | 1998-10-14 | Seiko Instruments Inc. | Scanning probe microscope |
JPH1130573A (en) * | 1997-05-20 | 1999-02-02 | Jeol Ltd | Holder holding device |
CN106124805A (en) * | 2016-07-26 | 2016-11-16 | 苏州衡微仪器科技有限公司 | A kind of Scan Architecture of PSTM |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
-
1987
- 1987-05-29 JP JP13388487A patent/JPS64401A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4343993A (en) * | 1979-09-20 | 1982-08-10 | International Business Machines Corporation | Scanning tunneling microscope |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02113104U (en) * | 1989-02-23 | 1990-09-11 | ||
JPH0312506A (en) * | 1989-06-09 | 1991-01-21 | Jeol Ltd | Scan image output system of scanning tunneling microscope |
EP0871006A1 (en) * | 1997-04-09 | 1998-10-14 | Seiko Instruments Inc. | Scanning probe microscope |
JPH1130573A (en) * | 1997-05-20 | 1999-02-02 | Jeol Ltd | Holder holding device |
CN106124805A (en) * | 2016-07-26 | 2016-11-16 | 苏州衡微仪器科技有限公司 | A kind of Scan Architecture of PSTM |
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