JPH0180755U - - Google Patents

Info

Publication number
JPH0180755U
JPH0180755U JP1987152539U JP15253987U JPH0180755U JP H0180755 U JPH0180755 U JP H0180755U JP 1987152539 U JP1987152539 U JP 1987152539U JP 15253987 U JP15253987 U JP 15253987U JP H0180755 U JPH0180755 U JP H0180755U
Authority
JP
Japan
Prior art keywords
micro
piezoelectric element
positioning mechanism
element body
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1987152539U
Other languages
English (en)
Other versions
JPH088405Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987152539U priority Critical patent/JPH088405Y2/ja
Publication of JPH0180755U publication Critical patent/JPH0180755U/ja
Application granted granted Critical
Publication of JPH088405Y2 publication Critical patent/JPH088405Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【図面の簡単な説明】
第1図は本考案の第1実施例微小位置決め機構
斜視図、第2図a,bは第1実施例微小位置決め
機構の断面図、第3図aおよび第3図bは第1実
施例微動素子体の電極配置展開平面図、第4図は
第1実施例微小位置決め機構を組込んだユニツト
の概略側面図、第5図は第2実施例微小位置決め
機構を示す斜視図、第6図は第3実施例微小位置
決め機構を組み込んだユニツトの概略側面図、第
7図は従来の中空円筒状微小位置決め機構を示す
斜視図、第8図は中空円筒状微動素子体の呼吸振
動を示す斜視図、第9図a,bは中空円筒状微動
機構の曲げ動作を示す側面図である。 1,1a,1b……一端が閉ざされた中空円筒
状圧電素子体、2……絶縁材、3……検出探針台
、4……検出探針ホルダー、5……検出探針、6
……内側共通電極(GND)、7,7……X
軸動作用電極、8,8……Y軸動作用電極、
9……Z軸動作用電極、11……一端が閉ざされ
た中空円錐状圧電素子体、21……従来の中空円
筒状圧電素子体。

Claims (1)

  1. 【実用新案登録請求の範囲】 (1) 検出探針部と試料間を微小に位置決めする
    微小位置決め機構において、一端が、閉ざされた
    中空円筒状に形成された圧電素子体に少なくとも
    一軸動作用の電極を設けたことを特徴とする圧電
    素子微小位置決機構。 (2) 前記、圧電素子体が中空円錐状に形成され
    たことを特徴とする実用新案登録請求の範囲第1
    項記載の圧電素子微小位置決め機構。
JP1987152539U 1987-10-05 1987-10-05 圧電素子微小位置決め機構 Expired - Lifetime JPH088405Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987152539U JPH088405Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987152539U JPH088405Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Publications (2)

Publication Number Publication Date
JPH0180755U true JPH0180755U (ja) 1989-05-30
JPH088405Y2 JPH088405Y2 (ja) 1996-03-06

Family

ID=31427559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987152539U Expired - Lifetime JPH088405Y2 (ja) 1987-10-05 1987-10-05 圧電素子微小位置決め機構

Country Status (1)

Country Link
JP (1) JPH088405Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287606A (ja) * 1988-05-16 1989-11-20 Mitsubishi Electric Corp 走査型トンネル顕微鏡の微動機構

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01287606A (ja) * 1988-05-16 1989-11-20 Mitsubishi Electric Corp 走査型トンネル顕微鏡の微動機構

Also Published As

Publication number Publication date
JPH088405Y2 (ja) 1996-03-06

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