JPH0211171B2 - - Google Patents
Info
- Publication number
- JPH0211171B2 JPH0211171B2 JP1389183A JP1389183A JPH0211171B2 JP H0211171 B2 JPH0211171 B2 JP H0211171B2 JP 1389183 A JP1389183 A JP 1389183A JP 1389183 A JP1389183 A JP 1389183A JP H0211171 B2 JPH0211171 B2 JP H0211171B2
- Authority
- JP
- Japan
- Prior art keywords
- case
- diaphragm
- piezoelectric
- conductive
- piezoelectric diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005284 excitation Effects 0.000 claims description 9
- 239000011810 insulating material Substances 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000011521 glass Substances 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders; Supports
- H03H9/10—Mounting in enclosures
- H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
- H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1389183A JPS59139713A (ja) | 1983-01-31 | 1983-01-31 | 圧電振動子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1389183A JPS59139713A (ja) | 1983-01-31 | 1983-01-31 | 圧電振動子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59139713A JPS59139713A (ja) | 1984-08-10 |
| JPH0211171B2 true JPH0211171B2 (US07655688-20100202-C00548.png) | 1990-03-13 |
Family
ID=11845806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1389183A Granted JPS59139713A (ja) | 1983-01-31 | 1983-01-31 | 圧電振動子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59139713A (US07655688-20100202-C00548.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62166608A (ja) * | 1986-01-17 | 1987-07-23 | Murata Mfg Co Ltd | 圧電共振子 |
| JPS62214712A (ja) * | 1986-03-14 | 1987-09-21 | Murata Mfg Co Ltd | 電子部品 |
-
1983
- 1983-01-31 JP JP1389183A patent/JPS59139713A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59139713A (ja) | 1984-08-10 |
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