JPH0210865B2 - - Google Patents

Info

Publication number
JPH0210865B2
JPH0210865B2 JP61213324A JP21332486A JPH0210865B2 JP H0210865 B2 JPH0210865 B2 JP H0210865B2 JP 61213324 A JP61213324 A JP 61213324A JP 21332486 A JP21332486 A JP 21332486A JP H0210865 B2 JPH0210865 B2 JP H0210865B2
Authority
JP
Japan
Prior art keywords
light source
chamber
substrate
substrate holder
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61213324A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6369976A (ja
Inventor
Masaichi Otaka
Tooru Takayama
Shigenori Hayashi
Takashi Inushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP21332486A priority Critical patent/JPS6369976A/ja
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to KR1019870009832A priority patent/KR910003742B1/ko
Priority to EP19920104124 priority patent/EP0490883A1/en
Priority to EP87307896A priority patent/EP0260097B1/en
Priority to DE8787307896T priority patent/DE3782991T2/de
Priority to CN87106283A priority patent/CN1020290C/zh
Publication of JPS6369976A publication Critical patent/JPS6369976A/ja
Priority to US07/194,206 priority patent/US4950624A/en
Publication of JPH0210865B2 publication Critical patent/JPH0210865B2/ja
Priority to US07/971,242 priority patent/US5427824A/en
Priority to US08/376,736 priority patent/US5629245A/en
Priority to US08/769,115 priority patent/US5855970A/en
Priority to US09/188,382 priority patent/US6013338A/en
Priority to US09/398,059 priority patent/US6520189B1/en
Priority to US10/339,631 priority patent/US20030140941A1/en
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP21332486A 1986-09-09 1986-09-09 光ｃｖｄ装置 Granted JPS6369976A (ja)

Priority Applications (13)

Application Number Priority Date Filing Date Title
JP21332486A JPS6369976A (ja) 1986-09-09 1986-09-09 光ｃｖｄ装置
KR1019870009832A KR910003742B1 (ko) 1986-09-09 1987-09-05 Cvd장치
EP19920104124 EP0490883A1 (en) 1986-09-09 1987-09-07 CVD apparatus
EP87307896A EP0260097B1 (en) 1986-09-09 1987-09-07 Cvd method and apparatus
DE8787307896T DE3782991T2 (de) 1986-09-09 1987-09-07 Cvd-verfahren und vorrichtung.
CN87106283A CN1020290C (zh) 1986-09-09 1987-09-09 化学汽相淀积装置
US07/194,206 US4950624A (en) 1986-09-09 1988-05-16 Method of depositing films using photo-CVD with chamber plasma cleaning
US07/971,242 US5427824A (en) 1986-09-09 1992-09-08 CVD apparatus
US08/376,736 US5629245A (en) 1986-09-09 1995-01-23 Method for forming a multi-layer planarization structure
US08/769,115 US5855970A (en) 1986-09-09 1996-12-18 Method of forming a film on a substrate
US09/188,382 US6013338A (en) 1986-09-09 1998-11-10 CVD apparatus
US09/398,059 US6520189B1 (en) 1986-09-09 1999-09-17 CVD apparatus
US10/339,631 US20030140941A1 (en) 1986-09-09 2003-01-10 CVD apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21332486A JPS6369976A (ja) 1986-09-09 1986-09-09 光ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS6369976A JPS6369976A (ja) 1988-03-30
JPH0210865B2 true JPH0210865B2 (cs) 1990-03-09

Family

ID=16637264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21332486A Granted JPS6369976A (ja) 1986-09-09 1986-09-09 光ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPS6369976A (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424990A (en) * 1977-07-26 1979-02-24 Toyo Soda Mfg Co Ltd Gas phase polymerization of vinyl chloride and/or vinyl chlroide analogue
JPS6027121A (ja) * 1983-07-22 1985-02-12 Semiconductor Energy Lab Co Ltd 光ｃｖｄ装置

Also Published As

Publication number Publication date
JPS6369976A (ja) 1988-03-30

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