JPH02108335U - - Google Patents

Info

Publication number
JPH02108335U
JPH02108335U JP1687789U JP1687789U JPH02108335U JP H02108335 U JPH02108335 U JP H02108335U JP 1687789 U JP1687789 U JP 1687789U JP 1687789 U JP1687789 U JP 1687789U JP H02108335 U JPH02108335 U JP H02108335U
Authority
JP
Japan
Prior art keywords
electrodes
wafer
electrode
view
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1687789U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0648834Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989016877U priority Critical patent/JPH0648834Y2/ja
Publication of JPH02108335U publication Critical patent/JPH02108335U/ja
Application granted granted Critical
Publication of JPH0648834Y2 publication Critical patent/JPH0648834Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP1989016877U 1989-02-17 1989-02-17 プラズマｃｖｄ装置 Expired - Fee Related JPH0648834Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989016877U JPH0648834Y2 (ja) 1989-02-17 1989-02-17 プラズマｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989016877U JPH0648834Y2 (ja) 1989-02-17 1989-02-17 プラズマｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH02108335U true JPH02108335U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-08-29
JPH0648834Y2 JPH0648834Y2 (ja) 1994-12-12

Family

ID=31230188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989016877U Expired - Fee Related JPH0648834Y2 (ja) 1989-02-17 1989-02-17 プラズマｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH0648834Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258924A (ja) * 1984-06-06 1985-12-20 Hitachi Ltd プラズマ処理装置
JPS6115321A (ja) * 1984-07-02 1986-01-23 Kanegafuchi Chem Ind Co Ltd 成膜方法
JPS6257213A (ja) * 1985-09-06 1987-03-12 Fuji Electric Corp Res & Dev Ltd プラズマｃｖｄ装置
JPH01127237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-02-24 1989-08-31

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258924A (ja) * 1984-06-06 1985-12-20 Hitachi Ltd プラズマ処理装置
JPS6115321A (ja) * 1984-07-02 1986-01-23 Kanegafuchi Chem Ind Co Ltd 成膜方法
JPS6257213A (ja) * 1985-09-06 1987-03-12 Fuji Electric Corp Res & Dev Ltd プラズマｃｖｄ装置
JPH01127237U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-02-24 1989-08-31

Also Published As

Publication number Publication date
JPH0648834Y2 (ja) 1994-12-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees