JPH02106455U - - Google Patents
Info
- Publication number
- JPH02106455U JPH02106455U JP1326289U JP1326289U JPH02106455U JP H02106455 U JPH02106455 U JP H02106455U JP 1326289 U JP1326289 U JP 1326289U JP 1326289 U JP1326289 U JP 1326289U JP H02106455 U JPH02106455 U JP H02106455U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrode
- vacuum
- vacuum vessel
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案による被膜形成装置構成の一実
施例を示す、要部の断面を含む正面図、第２図は
第１図に示す被膜形成装置の平面図、第３図は第
１図に示す被膜形成装置の要部の拡大断面図、第
４図は第３図のＡ―Ａ位置において矢印の方向に
見た要部の上面図、第５図は気密端子構造の一実
施例を示す断面図、第６図は被膜を形成した試料
の電気抵抗の従来の測定方法を示す図である。
２…気密端子、３…試料、５…電極、６…真空
容器。
FIG. 1 is a front view including a cross section of the main parts, showing an embodiment of the structure of a film forming apparatus according to the present invention, FIG. 2 is a plan view of the film forming apparatus shown in FIG. 1, and FIG. 3 is a view similar to that shown in FIG. 4 is an enlarged cross-sectional view of the main parts of the film forming apparatus shown in FIG. The cross-sectional view shown in FIG. 6 is a diagram showing a conventional method for measuring the electrical resistance of a sample on which a film has been formed. 2 ... Airtight terminal, 3... Sample, 5... Electrode, 6... Vacuum container.
Claims (1)
空容器内に平行に対向して配された、一方の電極
を構成するターゲツトと他方の電極との間に、該
対向方向と直角の方向に対向して配された２つの
電極の間に分析用試料などを置きその表面に金属
被膜を形成させる装置において、前記真空容器が
その容器壁に該容器壁を貫通して前記２つの電極
をそれぞれ該真空容器の外側へ引き出す気密端子
を備えていることを特徴とする被膜形成装置。 In order to generate a gas discharge within the vacuum vessel, a target constituting one electrode and the other electrode are disposed parallel to each other in the vacuum vessel, and are opposed in a direction perpendicular to the opposing direction. In this apparatus, a sample for analysis or the like is placed between two electrodes arranged in a vacuum chamber, and a metal coating is formed on the surface of the sample. A film forming device characterized by being equipped with an airtight terminal that can be pulled out to the outside of a vacuum container.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1326289U JPH02106455U (en) | 1989-02-07 | 1989-02-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1326289U JPH02106455U (en) | 1989-02-07 | 1989-02-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02106455U true JPH02106455U (en) | 1990-08-23 |
Family
ID=31223419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1326289U Pending JPH02106455U (en) | 1989-02-07 | 1989-02-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02106455U (en) |
-
1989
- 1989-02-07 JP JP1326289U patent/JPH02106455U/ja active Pending
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