JPS6312757U - - Google Patents

Info

Publication number
JPS6312757U
JPS6312757U JP10620786U JP10620786U JPS6312757U JP S6312757 U JPS6312757 U JP S6312757U JP 10620786 U JP10620786 U JP 10620786U JP 10620786 U JP10620786 U JP 10620786U JP S6312757 U JPS6312757 U JP S6312757U
Authority
JP
Japan
Prior art keywords
substrate
gas detection
gas
utility
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10620786U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10620786U priority Critical patent/JPS6312757U/ja
Publication of JPS6312757U publication Critical patent/JPS6312757U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの考案の第１実施例を示す三面図、
第２図はこの考案の第２実施例を示す上面図およ
び背面図、第３図は従来の薄膜型ガスセンサの構
造を示す三面図である。 １１：基板、１３：感ガス材料層、１２Ａ，１
２Ｂ：ガス検出用電極、１４：基板加熱ヒータ、
１７Ａ，１７Ｂ：リード線取付部。 FIG. 1 is a three-sided view showing the first embodiment of this invention;
FIG. 2 is a top view and rear view showing a second embodiment of this invention, and FIG. 3 is a three-sided view showing the structure of a conventional thin film gas sensor. 11: Substrate, 13: Gas-sensitive material layer, 12A, 1
2B: Gas detection electrode, 14: Substrate heater,
17A, 17B: Lead wire attachment part.

Claims (1)

【実用新案登録請求の範囲】 (1) 正方形の基板の表面の中央部に感ガス材料
層を設け、該感ガス材料層の信号を検出する２つ
のガス検出用電極を上記基板の対角線上にコーナ
部を含んで相対して設け、基板加熱ヒータを上記
基板の裏側表面に設け、該基板加熱ヒータ用の２
つのリード線取付部を上記ガス検出用電極と基板
の同一平面上の当該他のコーナ部に相対して設け
ることを特徴とするガス検出素子。 (2) 実用新案登録請求の範囲第１項記載の素子
において感ガス材料層として酸化スズの微粒子の
層を用いることを特徴とするガス検出素子。 (3) 実用新案登録請求の範囲第１項記載の素子
において、基板加熱ヒータと該ヒータのリード線
取付部を基板に設けたスルーホールを介して電気
的に接続することを特徴とするガス検出素子。 (4) 実用新案登録請求の範囲第１項記載の素子
において、基板加熱ヒータを基板の側端部に設け
た電気導通部を介してリード線取付部と電気的に
接続することを特徴とするガス検出素子。[Claims for Utility Model Registration] (1) A gas-sensitive material layer is provided in the center of the surface of a square substrate, and two gas detection electrodes for detecting signals from the gas-sensitive material layer are placed diagonally on the substrate. A substrate heater is provided on the back surface of the substrate, and two heaters for the substrate heater are provided facing each other including the corner portions.
A gas detection element, characterized in that two lead wire attachment parts are provided opposite to the other corner part on the same plane of the gas detection electrode and the substrate. (2) A gas detection element characterized in that a layer of fine particles of tin oxide is used as a gas-sensitive material layer in the element according to claim 1 of the Utility Model Registration. (3) Utility model registration A gas detection device according to claim 1, characterized in that a substrate heater and a lead wire attachment portion of the heater are electrically connected via a through hole provided in the substrate. element. (4) Utility model registration The device according to claim 1, characterized in that the substrate heater is electrically connected to the lead wire attachment portion through an electrically conductive portion provided at the side end of the substrate. Gas detection element.
JP10620786U 1986-07-10 1986-07-10 Pending JPS6312757U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10620786U JPS6312757U (en) 1986-07-10 1986-07-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10620786U JPS6312757U (en) 1986-07-10 1986-07-10

Publications (1)

Publication Number Publication Date
JPS6312757U true JPS6312757U (en) 1988-01-27

Family

ID=30981350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10620786U Pending JPS6312757U (en) 1986-07-10 1986-07-10

Country Status (1)

Country Link
JP (1) JPS6312757U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03130654A (en) * 1989-10-14 1991-06-04 Fuji Electric Co Ltd Gas sensor
WO1993016377A1 (en) * 1992-02-14 1993-08-19 Seiko Epson Corporation Humidity sensor and its manufacture

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199097A (en) * 1975-02-26 1976-09-01 Kyoto Ceramic GASUKENCHISOSHI
JPS5246889A (en) * 1975-10-11 1977-04-14 Hitachi Ltd Solid electrolyte oxygen detector
JPS5549706A (en) * 1978-10-02 1980-04-10 Omron Tateisi Electronics Co Pi or pid regulator

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5199097A (en) * 1975-02-26 1976-09-01 Kyoto Ceramic GASUKENCHISOSHI
JPS5246889A (en) * 1975-10-11 1977-04-14 Hitachi Ltd Solid electrolyte oxygen detector
JPS5549706A (en) * 1978-10-02 1980-04-10 Omron Tateisi Electronics Co Pi or pid regulator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03130654A (en) * 1989-10-14 1991-06-04 Fuji Electric Co Ltd Gas sensor
WO1993016377A1 (en) * 1992-02-14 1993-08-19 Seiko Epson Corporation Humidity sensor and its manufacture

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