JPH0210444Y2 - - Google Patents

Info

Publication number
JPH0210444Y2
JPH0210444Y2 JP1980106662U JP10666280U JPH0210444Y2 JP H0210444 Y2 JPH0210444 Y2 JP H0210444Y2 JP 1980106662 U JP1980106662 U JP 1980106662U JP 10666280 U JP10666280 U JP 10666280U JP H0210444 Y2 JPH0210444 Y2 JP H0210444Y2
Authority
JP
Japan
Prior art keywords
light
thin film
pattern
ultraviolet region
inspected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1980106662U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5729842U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980106662U priority Critical patent/JPH0210444Y2/ja
Publication of JPS5729842U publication Critical patent/JPS5729842U/ja
Application granted granted Critical
Publication of JPH0210444Y2 publication Critical patent/JPH0210444Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
JP1980106662U 1980-07-28 1980-07-28 Expired JPH0210444Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980106662U JPH0210444Y2 (enExample) 1980-07-28 1980-07-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980106662U JPH0210444Y2 (enExample) 1980-07-28 1980-07-28

Publications (2)

Publication Number Publication Date
JPS5729842U JPS5729842U (enExample) 1982-02-17
JPH0210444Y2 true JPH0210444Y2 (enExample) 1990-03-15

Family

ID=29468013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980106662U Expired JPH0210444Y2 (enExample) 1980-07-28 1980-07-28

Country Status (1)

Country Link
JP (1) JPH0210444Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007271410A (ja) * 2006-03-31 2007-10-18 Dainippon Printing Co Ltd 欠陥検出方法、欠陥検出装置及び欠陥検出プログラム
JP2019138696A (ja) * 2018-02-07 2019-08-22 上野精機株式会社 外観検査方法及び外観検査装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4951245U (enExample) * 1972-08-10 1974-05-07

Also Published As

Publication number Publication date
JPS5729842U (enExample) 1982-02-17

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