JPH02101532U - - Google Patents

Info

Publication number
JPH02101532U
JPH02101532U JP850589U JP850589U JPH02101532U JP H02101532 U JPH02101532 U JP H02101532U JP 850589 U JP850589 U JP 850589U JP 850589 U JP850589 U JP 850589U JP H02101532 U JPH02101532 U JP H02101532U
Authority
JP
Japan
Prior art keywords
film
semiconductor device
sog
sog film
ion implantation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP850589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP850589U priority Critical patent/JPH02101532U/ja
Publication of JPH02101532U publication Critical patent/JPH02101532U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP850589U 1989-01-27 1989-01-27 Pending JPH02101532U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP850589U JPH02101532U (enrdf_load_stackoverflow) 1989-01-27 1989-01-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP850589U JPH02101532U (enrdf_load_stackoverflow) 1989-01-27 1989-01-27

Publications (1)

Publication Number Publication Date
JPH02101532U true JPH02101532U (enrdf_load_stackoverflow) 1990-08-13

Family

ID=31214440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP850589U Pending JPH02101532U (enrdf_load_stackoverflow) 1989-01-27 1989-01-27

Country Status (1)

Country Link
JP (1) JPH02101532U (enrdf_load_stackoverflow)

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