JPH0198469U - - Google Patents
Info
- Publication number
- JPH0198469U JPH0198469U JP19559487U JP19559487U JPH0198469U JP H0198469 U JPH0198469 U JP H0198469U JP 19559487 U JP19559487 U JP 19559487U JP 19559487 U JP19559487 U JP 19559487U JP H0198469 U JPH0198469 U JP H0198469U
- Authority
- JP
- Japan
- Prior art keywords
- ion source
- arc chamber
- source head
- filament
- cooling jacket
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims 4
- 239000002826 coolant Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000004020 conductor Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000003507 refrigerant Substances 0.000 description 2
- 239000006200 vaporizer Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19559487U JPH0198469U (enrdf_load_stackoverflow) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19559487U JPH0198469U (enrdf_load_stackoverflow) | 1987-12-22 | 1987-12-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0198469U true JPH0198469U (enrdf_load_stackoverflow) | 1989-06-30 |
Family
ID=31486266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19559487U Pending JPH0198469U (enrdf_load_stackoverflow) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0198469U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |
-
1987
- 1987-12-22 JP JP19559487U patent/JPH0198469U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03222241A (ja) * | 1990-01-25 | 1991-10-01 | Tokyo Electron Ltd | イオン源装置 |
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