JPH0194467U - - Google Patents
Info
- Publication number
- JPH0194467U JPH0194467U JP19111887U JP19111887U JPH0194467U JP H0194467 U JPH0194467 U JP H0194467U JP 19111887 U JP19111887 U JP 19111887U JP 19111887 U JP19111887 U JP 19111887U JP H0194467 U JPH0194467 U JP H0194467U
- Authority
- JP
- Japan
- Prior art keywords
- heating means
- side wall
- heating
- quartz boat
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 claims description 11
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000001816 cooling Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 239000011343 solid material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 239000003708 ampul Substances 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19111887U JPH0449185Y2 (cs) | 1987-12-16 | 1987-12-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19111887U JPH0449185Y2 (cs) | 1987-12-16 | 1987-12-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0194467U true JPH0194467U (cs) | 1989-06-21 |
| JPH0449185Y2 JPH0449185Y2 (cs) | 1992-11-19 |
Family
ID=31482044
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19111887U Expired JPH0449185Y2 (cs) | 1987-12-16 | 1987-12-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0449185Y2 (cs) |
-
1987
- 1987-12-16 JP JP19111887U patent/JPH0449185Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0449185Y2 (cs) | 1992-11-19 |
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