JPH0193160A - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPH0193160A JPH0193160A JP62252062A JP25206287A JPH0193160A JP H0193160 A JPH0193160 A JP H0193160A JP 62252062 A JP62252062 A JP 62252062A JP 25206287 A JP25206287 A JP 25206287A JP H0193160 A JPH0193160 A JP H0193160A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- emitter
- transistor
- base
- collector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 17
- 239000000758 substrate Substances 0.000 claims abstract description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 16
- 239000000969 carrier Substances 0.000 abstract description 6
- 238000000034 method Methods 0.000 abstract description 2
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 6
- 229920005591 polysilicon Polymers 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910021426 porous silicon Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
Landscapes
- Bipolar Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62252062A JPH0193160A (ja) | 1987-10-05 | 1987-10-05 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62252062A JPH0193160A (ja) | 1987-10-05 | 1987-10-05 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0193160A true JPH0193160A (ja) | 1989-04-12 |
| JPH0529310B2 JPH0529310B2 (enrdf_load_stackoverflow) | 1993-04-30 |
Family
ID=17232026
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62252062A Granted JPH0193160A (ja) | 1987-10-05 | 1987-10-05 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0193160A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103572754A (zh) * | 2012-08-09 | 2014-02-12 | 上海中技桩业股份有限公司 | 一种部分预应力混凝土六角空心桩 |
-
1987
- 1987-10-05 JP JP62252062A patent/JPH0193160A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103572754A (zh) * | 2012-08-09 | 2014-02-12 | 上海中技桩业股份有限公司 | 一种部分预应力混凝土六角空心桩 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0529310B2 (enrdf_load_stackoverflow) | 1993-04-30 |
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