JPH0192126U - - Google Patents

Info

Publication number
JPH0192126U
JPH0192126U JP18750387U JP18750387U JPH0192126U JP H0192126 U JPH0192126 U JP H0192126U JP 18750387 U JP18750387 U JP 18750387U JP 18750387 U JP18750387 U JP 18750387U JP H0192126 U JPH0192126 U JP H0192126U
Authority
JP
Japan
Prior art keywords
parallelism
trays
wafers
sensor
normal pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18750387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH06817Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987187503U priority Critical patent/JPH06817Y2/ja
Publication of JPH0192126U publication Critical patent/JPH0192126U/ja
Application granted granted Critical
Publication of JPH06817Y2 publication Critical patent/JPH06817Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1987187503U 1987-12-09 1987-12-09 常圧ｃｖｄ装置 Expired - Lifetime JPH06817Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987187503U JPH06817Y2 (ja) 1987-12-09 1987-12-09 常圧ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987187503U JPH06817Y2 (ja) 1987-12-09 1987-12-09 常圧ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH0192126U true JPH0192126U (enExample) 1989-06-16
JPH06817Y2 JPH06817Y2 (ja) 1994-01-05

Family

ID=31478651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987187503U Expired - Lifetime JPH06817Y2 (ja) 1987-12-09 1987-12-09 常圧ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH06817Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013216948A (ja) * 2012-04-10 2013-10-24 Kojima Press Industry Co Ltd プラズマｃｖｄ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278477A (ja) * 1986-05-28 1987-12-03 Mitsubishi Electric Corp 自動車の車庫入れ支援システム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62278477A (ja) * 1986-05-28 1987-12-03 Mitsubishi Electric Corp 自動車の車庫入れ支援システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013216948A (ja) * 2012-04-10 2013-10-24 Kojima Press Industry Co Ltd プラズマｃｖｄ装置

Also Published As

Publication number Publication date
JPH06817Y2 (ja) 1994-01-05

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