JPS6365231U - - Google Patents
Info
- Publication number
- JPS6365231U JPS6365231U JP15964086U JP15964086U JPS6365231U JP S6365231 U JPS6365231 U JP S6365231U JP 15964086 U JP15964086 U JP 15964086U JP 15964086 U JP15964086 U JP 15964086U JP S6365231 U JPS6365231 U JP S6365231U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- wafer prober
- belt
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964086U JPS6365231U (enExample) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964086U JPS6365231U (enExample) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365231U true JPS6365231U (enExample) | 1988-04-30 |
Family
ID=31084262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15964086U Pending JPS6365231U (enExample) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365231U (enExample) |
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1986
- 1986-10-17 JP JP15964086U patent/JPS6365231U/ja active Pending