JPS6365231U - - Google Patents
Info
- Publication number
- JPS6365231U JPS6365231U JP15964086U JP15964086U JPS6365231U JP S6365231 U JPS6365231 U JP S6365231U JP 15964086 U JP15964086 U JP 15964086U JP 15964086 U JP15964086 U JP 15964086U JP S6365231 U JPS6365231 U JP S6365231U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- transfer device
- wafer prober
- belt
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964086U JPS6365231U (enExample) | 1986-10-17 | 1986-10-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15964086U JPS6365231U (enExample) | 1986-10-17 | 1986-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6365231U true JPS6365231U (enExample) | 1988-04-30 |
Family
ID=31084262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15964086U Pending JPS6365231U (enExample) | 1986-10-17 | 1986-10-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6365231U (enExample) |
-
1986
- 1986-10-17 JP JP15964086U patent/JPS6365231U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE3788014D1 (de) | Anordnung mit erwärmter Spannvorrichtung für Wafer mit integrierten Schaltungen. | |
| JPS6365231U (enExample) | ||
| JPS58138340U (ja) | ウエハの洗浄・エツチング用キヤリア | |
| JPH0459147U (enExample) | ||
| JPH01165643U (enExample) | ||
| JPS5352370A (en) | Wafer susceptor | |
| JPS6373934U (enExample) | ||
| JPH0457776U (enExample) | ||
| JPH0363937U (enExample) | ||
| JPH0423140U (enExample) | ||
| JPH0412646U (enExample) | ||
| JPH0256431U (enExample) | ||
| JPS6298233U (enExample) | ||
| JPS58109040U (ja) | 温度分布測定装置 | |
| JPH0192126U (enExample) | ||
| JPS6351435U (enExample) | ||
| JPS646044U (enExample) | ||
| JPH0412630U (enExample) | ||
| JPS63100825U (enExample) | ||
| JPH03120560U (enExample) | ||
| JPS63132434U (enExample) | ||
| JPH02131674U (enExample) | ||
| JPS62136432U (enExample) | ||
| JPS62122342U (enExample) | ||
| JPH01130533U (enExample) |