JPS63200336U - - Google Patents
Info
- Publication number
- JPS63200336U JPS63200336U JP1987092332U JP9233287U JPS63200336U JP S63200336 U JPS63200336 U JP S63200336U JP 1987092332 U JP1987092332 U JP 1987092332U JP 9233287 U JP9233287 U JP 9233287U JP S63200336 U JPS63200336 U JP S63200336U
- Authority
- JP
- Japan
- Prior art keywords
- gas supply
- supply head
- film
- semiconductor manufacturing
- height
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987092332U JPS63200336U (enExample) | 1987-06-15 | 1987-06-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987092332U JPS63200336U (enExample) | 1987-06-15 | 1987-06-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63200336U true JPS63200336U (enExample) | 1988-12-23 |
Family
ID=30953944
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987092332U Pending JPS63200336U (enExample) | 1987-06-15 | 1987-06-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63200336U (enExample) |
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1987
- 1987-06-15 JP JP1987092332U patent/JPS63200336U/ja active Pending