JPS63134536U - - Google Patents
Info
- Publication number
- JPS63134536U JPS63134536U JP1987028018U JP2801887U JPS63134536U JP S63134536 U JPS63134536 U JP S63134536U JP 1987028018 U JP1987028018 U JP 1987028018U JP 2801887 U JP2801887 U JP 2801887U JP S63134536 U JPS63134536 U JP S63134536U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- sprays
- transported
- model registration
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987028018U JPH069502Y2 (ja) | 1987-02-25 | 1987-02-25 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987028018U JPH069502Y2 (ja) | 1987-02-25 | 1987-02-25 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63134536U true JPS63134536U (enExample) | 1988-09-02 |
| JPH069502Y2 JPH069502Y2 (ja) | 1994-03-09 |
Family
ID=30830595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987028018U Expired - Lifetime JPH069502Y2 (ja) | 1987-02-25 | 1987-02-25 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069502Y2 (enExample) |
-
1987
- 1987-02-25 JP JP1987028018U patent/JPH069502Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069502Y2 (ja) | 1994-03-09 |