JPS628631U - - Google Patents
Info
- Publication number
- JPS628631U JPS628631U JP9815485U JP9815485U JPS628631U JP S628631 U JPS628631 U JP S628631U JP 9815485 U JP9815485 U JP 9815485U JP 9815485 U JP9815485 U JP 9815485U JP S628631 U JPS628631 U JP S628631U
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- hot plate
- raw material
- vapor phase
- material gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002994 raw material Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001947 vapour-phase growth Methods 0.000 claims 3
- 238000006243 chemical reaction Methods 0.000 claims 1
- 238000010574 gas phase reaction Methods 0.000 claims 1
- 239000012808 vapor phase Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815485U JPS628631U (enExample) | 1985-06-27 | 1985-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9815485U JPS628631U (enExample) | 1985-06-27 | 1985-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS628631U true JPS628631U (enExample) | 1987-01-19 |
Family
ID=30965829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9815485U Pending JPS628631U (enExample) | 1985-06-27 | 1985-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS628631U (enExample) |
-
1985
- 1985-06-27 JP JP9815485U patent/JPS628631U/ja active Pending