JPH0189734U - - Google Patents

Info

Publication number
JPH0189734U
JPH0189734U JP18575787U JP18575787U JPH0189734U JP H0189734 U JPH0189734 U JP H0189734U JP 18575787 U JP18575787 U JP 18575787U JP 18575787 U JP18575787 U JP 18575787U JP H0189734 U JPH0189734 U JP H0189734U
Authority
JP
Japan
Prior art keywords
ray exposure
ray
tilted
mask
diffraction grating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18575787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18575787U priority Critical patent/JPH0189734U/ja
Publication of JPH0189734U publication Critical patent/JPH0189734U/ja
Pending legal-status Critical Current

Links

JP18575787U 1987-12-04 1987-12-04 Pending JPH0189734U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18575787U JPH0189734U (OSRAM) 1987-12-04 1987-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18575787U JPH0189734U (OSRAM) 1987-12-04 1987-12-04

Publications (1)

Publication Number Publication Date
JPH0189734U true JPH0189734U (OSRAM) 1989-06-13

Family

ID=31477024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18575787U Pending JPH0189734U (OSRAM) 1987-12-04 1987-12-04

Country Status (1)

Country Link
JP (1) JPH0189734U (OSRAM)

Similar Documents

Publication Publication Date Title
JP3706691B2 (ja) Ｘ線縮小投影露光装置及びこれを用いた半導体デバイス製造方法
JP2979667B2 (ja) 反射型のｘ線露光用マスク
US4231657A (en) Light-reflection type pattern forming system
JPH0189734U (OSRAM)
JP2645347B2 (ja) 平行ｘ線用露光マスク
JP3371510B2 (ja) 照明装置及び露光装置
JPS58215621A (ja) １「あ」１プロジエクシヨンアライナ
JPS60173551A (ja) Ｘ線など光線の反射投影によるパタ−ン転写法
JPH09153446A5 (OSRAM)
JP3371512B2 (ja) 照明装置及び露光装置
JP2503696B2 (ja) 投影露光装置
JPH0359569B2 (OSRAM)
JP3202046B2 (ja) 照明用光学装置
JPH0244276Y2 (OSRAM)
JP3279090B2 (ja) 照明装置および露光装置
JPS59218729A (ja) 投影露光装置
JPS5943556Y2 (ja) 光照射装置
JP3165744B2 (ja) 露光装置などの光学装置、及び半導体デバイス製造方法
JPH01198026A (ja) 半導体ウェハの露光装置
JPS61168917A (ja) 露光方法および露光装置
JPH0436360B2 (OSRAM)
JPH04144224A (ja) Ｘ線露光装置
JPH0349213A (ja) 露光装置
JPH02298948A (ja) パターン形成方法
JP3715984B2 (ja) Ｘ線縮小投影露光方法、ｘ線縮小投影露光装置及びこれを用いた半導体デバイス製造方法