JPH0170863U - - Google Patents
Info
- Publication number
- JPH0170863U JPH0170863U JP1987162826U JP16282687U JPH0170863U JP H0170863 U JPH0170863 U JP H0170863U JP 1987162826 U JP1987162826 U JP 1987162826U JP 16282687 U JP16282687 U JP 16282687U JP H0170863 U JPH0170863 U JP H0170863U
- Authority
- JP
- Japan
- Prior art keywords
- suction port
- vacuum
- chamber
- ion
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 238000005086 pumping Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162826U JPH0170863U (fr) | 1987-10-24 | 1987-10-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987162826U JPH0170863U (fr) | 1987-10-24 | 1987-10-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0170863U true JPH0170863U (fr) | 1989-05-11 |
Family
ID=31447009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987162826U Pending JPH0170863U (fr) | 1987-10-24 | 1987-10-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0170863U (fr) |
-
1987
- 1987-10-24 JP JP1987162826U patent/JPH0170863U/ja active Pending
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