JPH01122834U - - Google Patents
Info
- Publication number
- JPH01122834U JPH01122834U JP1316688U JP1316688U JPH01122834U JP H01122834 U JPH01122834 U JP H01122834U JP 1316688 U JP1316688 U JP 1316688U JP 1316688 U JP1316688 U JP 1316688U JP H01122834 U JPH01122834 U JP H01122834U
- Authority
- JP
- Japan
- Prior art keywords
- storage type
- vacuum
- chamber
- processing tank
- type vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001172 regenerating effect Effects 0.000 claims 1
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1316688U JPH01122834U (fr) | 1988-02-02 | 1988-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1316688U JPH01122834U (fr) | 1988-02-02 | 1988-02-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01122834U true JPH01122834U (fr) | 1989-08-21 |
Family
ID=31223256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1316688U Pending JPH01122834U (fr) | 1988-02-02 | 1988-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01122834U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05269361A (ja) * | 1992-03-27 | 1993-10-19 | Hitachi Ltd | 真空処理装置 |
-
1988
- 1988-02-02 JP JP1316688U patent/JPH01122834U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05269361A (ja) * | 1992-03-27 | 1993-10-19 | Hitachi Ltd | 真空処理装置 |