JPH0163135U - - Google Patents

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Publication number
JPH0163135U
JPH0163135U JP1987159028U JP15902887U JPH0163135U JP H0163135 U JPH0163135 U JP H0163135U JP 1987159028 U JP1987159028 U JP 1987159028U JP 15902887 U JP15902887 U JP 15902887U JP H0163135 U JPH0163135 U JP H0163135U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
setting table
heating furnace
supports
transport mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987159028U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987159028U priority Critical patent/JPH0163135U/ja
Publication of JPH0163135U publication Critical patent/JPH0163135U/ja
Pending legal-status Critical Current

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  • Weting (AREA)

Description

【図面の簡単な説明】
第１図は本考案の半導体ウエハーの化学エツチ
ング装置の一実施例におけるウエハーセツト台の
斜視図、第２図はエツチング装置の全体構成図、
第３図はエツチング液の温度制御特性曲線図であ
る。 １：ウエハーセツト台、２：受皿、３：ウエハ
ー、４：昇降装置、５：一軸テーブル、７：加熱
炉、８：エツチング装置、９：洗浄装置、１０：
るつぼ、１１，１２：温度調節器、２６：コント
ローラー、２７：タイマー。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハーをエツチング液に浸漬させて化
    学的に研磨する半導体ウエハーの化学エツチング
    装置において、複数枚の前記半導体ウエハーを凹
    凸の網目状受皿で支持する多段式ウエハーセツト
    台と、該ウエハーセツト台をウエハー加熱炉、エ
    ツチング装置及び洗浄装置に順次搬送する搬送機
    構と、該搬送機構と前記加熱炉とが設けられてい
    ることを特徴とする半導体ウエハーの化学エツチ
    ング装置。
JP1987159028U 1987-10-16 1987-10-16 Pending JPH0163135U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987159028U JPH0163135U (ja) 1987-10-16 1987-10-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987159028U JPH0163135U (ja) 1987-10-16 1987-10-16

Publications (1)

Publication Number Publication Date
JPH0163135U true JPH0163135U (ja) 1989-04-24

Family

ID=31439874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987159028U Pending JPH0163135U (ja) 1987-10-16 1987-10-16

Country Status (1)

Country Link
JP (1) JPH0163135U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008252122A (ja) * 2008-06-16 2008-10-16 Dainippon Screen Mfg Co Ltd 基板処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008252122A (ja) * 2008-06-16 2008-10-16 Dainippon Screen Mfg Co Ltd 基板処理装置
JP4628448B2 (ja) * 2008-06-16 2011-02-09 大日本スクリーン製造株式会社 基板処理装置

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