JPH0159521B2 - - Google Patents

Info

Publication number
JPH0159521B2
JPH0159521B2 JP1977479A JP1977479A JPH0159521B2 JP H0159521 B2 JPH0159521 B2 JP H0159521B2 JP 1977479 A JP1977479 A JP 1977479A JP 1977479 A JP1977479 A JP 1977479A JP H0159521 B2 JPH0159521 B2 JP H0159521B2
Authority
JP
Japan
Prior art keywords
signal
defect
wafer
pulse
face plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55112502A (en
Inventor
Motoo Horai
Yasuo Hachikake
Aiichi Ishikawa
Nobuyuki Yoshida
Michio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi High Tech Corp
Original Assignee
Hitachi Ltd
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Ltd
Priority to JP1977479A priority Critical patent/JPS55112502A/ja
Publication of JPS55112502A publication Critical patent/JPS55112502A/ja
Publication of JPH0159521B2 publication Critical patent/JPH0159521B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP1977479A 1979-02-23 1979-02-23 Plate automatic examination unit Granted JPS55112502A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977479A JPS55112502A (en) 1979-02-23 1979-02-23 Plate automatic examination unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977479A JPS55112502A (en) 1979-02-23 1979-02-23 Plate automatic examination unit

Publications (2)

Publication Number Publication Date
JPS55112502A JPS55112502A (en) 1980-08-30
JPH0159521B2 true JPH0159521B2 (OSRAM) 1989-12-18

Family

ID=12008674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977479A Granted JPS55112502A (en) 1979-02-23 1979-02-23 Plate automatic examination unit

Country Status (1)

Country Link
JP (1) JPS55112502A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021069982A1 (en) 2019-10-07 2021-04-15 Ricoh Company, Ltd. Imaging optical system and camera
EP3859421A1 (en) 2020-01-29 2021-08-04 Ricoh Company, Ltd. Imaging lens and camera apparatus and mobile object

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013248A (ja) * 1983-07-04 1985-01-23 Koyo Jidoki Kk レ−ザ光による被検査物表面の欠陥部と塵埃の判別方法
US4659220A (en) * 1984-10-22 1987-04-21 International Business Machines Corporation Optical inspection system for semiconductor wafers
JPS61278739A (ja) * 1985-06-03 1986-12-09 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6211148A (ja) * 1985-06-28 1987-01-20 Hitachi Electronics Eng Co Ltd 異物検査装置
JPS6275336A (ja) * 1985-09-30 1987-04-07 Hitachi Electronics Eng Co Ltd 異物検査装置
US20040057044A1 (en) 1994-12-08 2004-03-25 Mehrdad Nikoonahad Scanning system for inspecting anamolies on surfaces
WO1997046865A1 (en) 1996-06-04 1997-12-11 Tencor Instruments Optical scanning system for surface inspection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021069982A1 (en) 2019-10-07 2021-04-15 Ricoh Company, Ltd. Imaging optical system and camera
EP3859421A1 (en) 2020-01-29 2021-08-04 Ricoh Company, Ltd. Imaging lens and camera apparatus and mobile object

Also Published As

Publication number Publication date
JPS55112502A (en) 1980-08-30

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