JPH0158658B2 - - Google Patents
Info
- Publication number
- JPH0158658B2 JPH0158658B2 JP18204384A JP18204384A JPH0158658B2 JP H0158658 B2 JPH0158658 B2 JP H0158658B2 JP 18204384 A JP18204384 A JP 18204384A JP 18204384 A JP18204384 A JP 18204384A JP H0158658 B2 JPH0158658 B2 JP H0158658B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- plate
- rotor
- wafer
- vacuum chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18204384A JPS6159745A (ja) | 1984-08-30 | 1984-08-30 | ウエハの位置合わせ方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18204384A JPS6159745A (ja) | 1984-08-30 | 1984-08-30 | ウエハの位置合わせ方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6159745A JPS6159745A (ja) | 1986-03-27 |
| JPH0158658B2 true JPH0158658B2 (cs) | 1989-12-13 |
Family
ID=16111341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18204384A Granted JPS6159745A (ja) | 1984-08-30 | 1984-08-30 | ウエハの位置合わせ方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6159745A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023052839A1 (en) | 2021-09-30 | 2023-04-06 | Raiz - Instituto De Investigação Da Floresta E Papel | Chromogenic copolymer, method of producing the same, products incorporating the same and method for detecting counterfeiting and for products authentication |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100915835B1 (ko) * | 2006-09-05 | 2009-09-07 | 라인시스템(주) | 스크린 인쇄설비의 인쇄물 자동정렬장치 및 방법 |
-
1984
- 1984-08-30 JP JP18204384A patent/JPS6159745A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023052839A1 (en) | 2021-09-30 | 2023-04-06 | Raiz - Instituto De Investigação Da Floresta E Papel | Chromogenic copolymer, method of producing the same, products incorporating the same and method for detecting counterfeiting and for products authentication |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6159745A (ja) | 1986-03-27 |
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