JPS6159745A - ウエハの位置合わせ方法 - Google Patents

ウエハの位置合わせ方法

Info

Publication number
JPS6159745A
JPS6159745A JP18204384A JP18204384A JPS6159745A JP S6159745 A JPS6159745 A JP S6159745A JP 18204384 A JP18204384 A JP 18204384A JP 18204384 A JP18204384 A JP 18204384A JP S6159745 A JPS6159745 A JP S6159745A
Authority
JP
Japan
Prior art keywords
wafer
rotor
semiconductor wafer
vacuum chuck
air nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18204384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0158658B2 (cs
Inventor
Yoshio Watanabe
義雄 渡辺
Hitoshi Miyazawa
宮沢　均
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP18204384A priority Critical patent/JPS6159745A/ja
Publication of JPS6159745A publication Critical patent/JPS6159745A/ja
Publication of JPH0158658B2 publication Critical patent/JPH0158658B2/ja
Granted legal-status Critical Current

Links

JP18204384A 1984-08-30 1984-08-30 ウエハの位置合わせ方法 Granted JPS6159745A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18204384A JPS6159745A (ja) 1984-08-30 1984-08-30 ウエハの位置合わせ方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18204384A JPS6159745A (ja) 1984-08-30 1984-08-30 ウエハの位置合わせ方法

Publications (2)

Publication Number Publication Date
JPS6159745A true JPS6159745A (ja) 1986-03-27
JPH0158658B2 JPH0158658B2 (cs) 1989-12-13

Family

ID=16111341

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18204384A Granted JPS6159745A (ja) 1984-08-30 1984-08-30 ウエハの位置合わせ方法

Country Status (1)

Country Link
JP (1) JPS6159745A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100915835B1 (ko) * 2006-09-05 2009-09-07 라인시스템(주) 스크린 인쇄설비의 인쇄물 자동정렬장치 및 방법

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PT117491B (pt) 2021-09-30 2024-03-12 Univ De Coimbra Copolímero cromogénico, seu método de obtenção, produtos que o incorporam e método de deteção de contrafação e autenticaçao de produtos

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100915835B1 (ko) * 2006-09-05 2009-09-07 라인시스템(주) 스크린 인쇄설비의 인쇄물 자동정렬장치 및 방법

Also Published As

Publication number Publication date
JPH0158658B2 (cs) 1989-12-13

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