JPH0157999B2 - - Google Patents

Info

Publication number
JPH0157999B2
JPH0157999B2 JP59259738A JP25973884A JPH0157999B2 JP H0157999 B2 JPH0157999 B2 JP H0157999B2 JP 59259738 A JP59259738 A JP 59259738A JP 25973884 A JP25973884 A JP 25973884A JP H0157999 B2 JPH0157999 B2 JP H0157999B2
Authority
JP
Japan
Prior art keywords
laser beam
processing
laser
photoelectric conversion
conversion element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59259738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61137693A (ja
Inventor
Shigeru Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP59259738A priority Critical patent/JPS61137693A/ja
Publication of JPS61137693A publication Critical patent/JPS61137693A/ja
Publication of JPH0157999B2 publication Critical patent/JPH0157999B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • B23K26/707Auxiliary equipment for monitoring laser beam transmission optics

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
JP59259738A 1984-12-07 1984-12-07 レ−ザ加工装置 Granted JPS61137693A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59259738A JPS61137693A (ja) 1984-12-07 1984-12-07 レ−ザ加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59259738A JPS61137693A (ja) 1984-12-07 1984-12-07 レ−ザ加工装置

Publications (2)

Publication Number Publication Date
JPS61137693A JPS61137693A (ja) 1986-06-25
JPH0157999B2 true JPH0157999B2 (enrdf_load_stackoverflow) 1989-12-08

Family

ID=17338259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59259738A Granted JPS61137693A (ja) 1984-12-07 1984-12-07 レ−ザ加工装置

Country Status (1)

Country Link
JP (1) JPS61137693A (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0515427Y2 (enrdf_load_stackoverflow) * 1987-02-04 1993-04-22
JP2602711B2 (ja) * 1989-02-02 1997-04-23 川崎重工業株式会社 光学系熱変形制御装置およびその操作方法
KR100453984B1 (ko) * 2001-08-27 2004-10-26 동양반도체 주식회사 레이저장치의 보조빔 정렬장치
JP5242036B2 (ja) * 2006-10-12 2013-07-24 日立造船株式会社 レーザ加工装置
JP4657267B2 (ja) * 2007-08-10 2011-03-23 トヨタ自動車株式会社 レーザ溶接検査装置
DE102009007769B4 (de) * 2009-02-05 2016-07-14 Jenoptik Automatisierungstechnik Gmbh Laserbearbeitungskopf mit integrierter Sensoreinrichtung zur Fokuslagenüberwachung
DE102009059245B4 (de) 2009-12-21 2011-09-22 Lt Ultra-Precision-Technology Gmbh Verfahren und Vorrichtung zur Erfassung und Justierung des Fokus eines Laserstrahls bei der Laserbearbeitung von Werkstücken
ITMI20100059A1 (it) * 2010-01-20 2011-07-21 Sintesi S C P A Sistema di misurazione dell'indice di rifrazione di una lente
DE102011054941B3 (de) * 2011-10-28 2013-01-17 Qioptiq Photonics Gmbh & Co. Kg Vorrichtung und Verfahren zur Korrektur der thermischen Verschiebung der Fokuslage von über Optiken geführten Laserstrahlen
DE102013008646B4 (de) 2013-05-21 2020-06-10 Lt-Ultra Precision Technology Gmbh Adaptiver Spiegel für eine Laserbearbeitungsvorrichtung
DE202013004724U1 (de) 2013-05-21 2013-06-04 Lt-Ultra Precision Technology Gmbh Adaptiver Spiegel für eine Laserbearbeitungsvorrichtung
DE102013008647B4 (de) 2013-05-21 2019-02-21 Lt-Ultra Precision Technology Gmbh Laserbearbeitungsvorrichtung mit zwei adaptiven Spiegeln
DE102013008645B3 (de) 2013-05-21 2014-08-21 Alsitec S.A.R.L. Bearbeitungskopf für eine Laserbearbeitungsvorrichtung, Laserbearbeitungsvorrichtung sowie Verfahren zum Messen von Veränderungen der Brennweite einer in einem Bearbeitungskopf enthaltenen Fokussieroptik
DE202013004725U1 (de) 2013-05-21 2013-06-04 Alsitec Sarl Bearbeitungskopf für eine Laserbearbeitungsvorrichtung
JP7411887B2 (ja) * 2020-01-28 2024-01-12 パナソニックIpマネジメント株式会社 レーザー加工装置、及びレーザー加工装置の焦点制御方法

Also Published As

Publication number Publication date
JPS61137693A (ja) 1986-06-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term