JPH0155558B2 - - Google Patents
Info
- Publication number
- JPH0155558B2 JPH0155558B2 JP57173166A JP17316682A JPH0155558B2 JP H0155558 B2 JPH0155558 B2 JP H0155558B2 JP 57173166 A JP57173166 A JP 57173166A JP 17316682 A JP17316682 A JP 17316682A JP H0155558 B2 JPH0155558 B2 JP H0155558B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode layer
- back electrode
- insulating
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 21
- 229910044991 metal oxide Inorganic materials 0.000 claims description 20
- 150000004706 metal oxides Chemical class 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 8
- 239000011810 insulating material Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 238000005566 electron beam evaporation Methods 0.000 claims description 5
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 238000000059 patterning Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000002950 deficient Effects 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000011295 pitch Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57173166A JPS5963692A (ja) | 1982-10-04 | 1982-10-04 | 薄膜ｅｌパネルの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57173166A JPS5963692A (ja) | 1982-10-04 | 1982-10-04 | 薄膜ｅｌパネルの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5963692A JPS5963692A (ja) | 1984-04-11 |
| JPH0155558B2 true JPH0155558B2 (ko) | 1989-11-24 |
Family
ID=15955317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57173166A Granted JPS5963692A (ja) | 1982-10-04 | 1982-10-04 | 薄膜ｅｌパネルの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5963692A (ko) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129296A (en) * | 1977-03-11 | 1977-10-29 | Sharp Corp | Thin film light emitting element |
| JPS5743392A (en) * | 1980-08-28 | 1982-03-11 | Matsushita Electric Ind Co Ltd | Electric field light emitting element |
| JPS58216391A (ja) * | 1982-06-10 | 1983-12-16 | 株式会社リコー | 薄膜ｅｌ素子 |
-
1982
- 1982-10-04 JP JP57173166A patent/JPS5963692A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52129296A (en) * | 1977-03-11 | 1977-10-29 | Sharp Corp | Thin film light emitting element |
| JPS5743392A (en) * | 1980-08-28 | 1982-03-11 | Matsushita Electric Ind Co Ltd | Electric field light emitting element |
| JPS58216391A (ja) * | 1982-06-10 | 1983-12-16 | 株式会社リコー | 薄膜ｅｌ素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5963692A (ja) | 1984-04-11 |
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