JPH0154318B2 - - Google Patents

Info

Publication number
JPH0154318B2
JPH0154318B2 JP59166843A JP16684384A JPH0154318B2 JP H0154318 B2 JPH0154318 B2 JP H0154318B2 JP 59166843 A JP59166843 A JP 59166843A JP 16684384 A JP16684384 A JP 16684384A JP H0154318 B2 JPH0154318 B2 JP H0154318B2
Authority
JP
Japan
Prior art keywords
crucible
silicon
glass crucible
quartz glass
silicon single
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59166843A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6144792A (ja
Inventor
Hitoshi Hasebe
Masato Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP16684384A priority Critical patent/JPS6144792A/ja
Publication of JPS6144792A publication Critical patent/JPS6144792A/ja
Publication of JPH0154318B2 publication Critical patent/JPH0154318B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16684384A 1984-08-09 1984-08-09 シリコン単結晶引上装置 Granted JPS6144792A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16684384A JPS6144792A (ja) 1984-08-09 1984-08-09 シリコン単結晶引上装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16684384A JPS6144792A (ja) 1984-08-09 1984-08-09 シリコン単結晶引上装置

Publications (2)

Publication Number Publication Date
JPS6144792A JPS6144792A (ja) 1986-03-04
JPH0154318B2 true JPH0154318B2 (enrdf_load_stackoverflow) 1989-11-17

Family

ID=15838677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16684384A Granted JPS6144792A (ja) 1984-08-09 1984-08-09 シリコン単結晶引上装置

Country Status (1)

Country Link
JP (1) JPS6144792A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0699222B2 (ja) * 1986-04-24 1994-12-07 三菱マテリアル株式会社 単結晶製造用ルツボ
JP3475407B2 (ja) 1997-03-31 2003-12-08 キヤノン株式会社 フッ化物結晶の製造装置及び製造法並びにルツボ

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU661966A1 (ru) * 1976-11-23 1980-04-05 Всесоюзный Научно-Исследовательский Институт Монокристаллов И Особо Чистых Химических Веществ "Вниимонокристалл" Устройство дл выт гивани монокристаллов из расплава
JPS5750729Y2 (enrdf_load_stackoverflow) * 1978-10-04 1982-11-06
JPS5715075A (en) * 1980-06-27 1982-01-26 Caterpillar Mitsubishi Ltd Hermetically sealing device of oil for hermetically sealed lubrication type truck

Also Published As

Publication number Publication date
JPS6144792A (ja) 1986-03-04

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