JPH0154244B2 - - Google Patents

Info

Publication number
JPH0154244B2
JPH0154244B2 JP23533385A JP23533385A JPH0154244B2 JP H0154244 B2 JPH0154244 B2 JP H0154244B2 JP 23533385 A JP23533385 A JP 23533385A JP 23533385 A JP23533385 A JP 23533385A JP H0154244 B2 JPH0154244 B2 JP H0154244B2
Authority
JP
Japan
Prior art keywords
pair
pulleys
mechanisms
belt
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP23533385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6296219A (ja
Inventor
Yoshihide Suwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP23533385A priority Critical patent/JPS6296219A/ja
Publication of JPS6296219A publication Critical patent/JPS6296219A/ja
Publication of JPH0154244B2 publication Critical patent/JPH0154244B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Structure Of Belt Conveyors (AREA)
  • Framework For Endless Conveyors (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP23533385A 1985-10-23 1985-10-23 搬送装置 Granted JPS6296219A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23533385A JPS6296219A (ja) 1985-10-23 1985-10-23 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23533385A JPS6296219A (ja) 1985-10-23 1985-10-23 搬送装置

Publications (2)

Publication Number Publication Date
JPS6296219A JPS6296219A (ja) 1987-05-02
JPH0154244B2 true JPH0154244B2 (tr) 1989-11-17

Family

ID=16984549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23533385A Granted JPS6296219A (ja) 1985-10-23 1985-10-23 搬送装置

Country Status (1)

Country Link
JP (1) JPS6296219A (tr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002019959A (ja) * 2000-07-06 2002-01-23 Ishikawajima Harima Heavy Ind Co Ltd 基板移載装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5890611B2 (ja) * 2011-03-28 2016-03-22 平田機工株式会社 生産装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002019959A (ja) * 2000-07-06 2002-01-23 Ishikawajima Harima Heavy Ind Co Ltd 基板移載装置
JP4496447B2 (ja) * 2000-07-06 2010-07-07 株式会社Ｉｈｉ 基板移載装置

Also Published As

Publication number Publication date
JPS6296219A (ja) 1987-05-02

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