JPH01500052A - 材料の状態特にその材料のガス又は液体の吸着を検出する装置 - Google Patents

材料の状態特にその材料のガス又は液体の吸着を検出する装置

Info

Publication number
JPH01500052A
JPH01500052A JP50512386A JP50512386A JPH01500052A JP H01500052 A JPH01500052 A JP H01500052A JP 50512386 A JP50512386 A JP 50512386A JP 50512386 A JP50512386 A JP 50512386A JP H01500052 A JPH01500052 A JP H01500052A
Authority
JP
Japan
Prior art keywords
electrode assembly
detection device
assembly
piezoelectric
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50512386A
Other languages
English (en)
Japanese (ja)
Inventor
ヴェネーマ,アドリアヌス
Original Assignee
ネデルランツェ オルガニサティ ヴォール テッゲパスト―ナテゥールヴェーテンシャペリック オンデルズク ティーエヌオー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ネデルランツェ オルガニサティ ヴォール テッゲパスト―ナテゥールヴェーテンシャペリック オンデルズク ティーエヌオー filed Critical ネデルランツェ オルガニサティ ヴォール テッゲパスト―ナテゥールヴェーテンシャペリック オンデルズク ティーエヌオー
Publication of JPH01500052A publication Critical patent/JPH01500052A/ja
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02Analysing fluids
    • G01N29/022Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/02Indexing codes associated with the analysed material
    • G01N2291/025Change of phase or condition
    • G01N2291/0256Adsorption, desorption, surface mass change, e.g. on biosensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00Indexing codes associated with group G01N29/00
    • G01N2291/04Wave modes and trajectories
    • G01N2291/042Wave modes
    • G01N2291/0423Surface waves, e.g. Rayleigh waves, Love waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
JP50512386A 1985-09-26 1986-09-26 材料の状態特にその材料のガス又は液体の吸着を検出する装置 Pending JPH01500052A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8502634 1985-09-26
NL8502634A NL8502634A (nl) 1985-09-26 1985-09-26 Toestel voor het vaststellen van de toestand van een materiaal, in het bijzonder de adsorptie van een gas of vloeistof aan dit materiaal.

Publications (1)

Publication Number Publication Date
JPH01500052A true JPH01500052A (ja) 1989-01-12

Family

ID=19846619

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50512386A Pending JPH01500052A (ja) 1985-09-26 1986-09-26 材料の状態特にその材料のガス又は液体の吸着を検出する装置

Country Status (4)

Country Link
EP (1) EP0239608A1 (fr)
JP (1) JPH01500052A (fr)
NL (1) NL8502634A (fr)
WO (1) WO1987002134A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005331326A (ja) * 2004-05-19 2005-12-02 Japan Radio Co Ltd 弾性波センサ
JPWO2004086028A1 (ja) * 2003-03-26 2006-06-29 一司 山中 センサヘッド、ガスセンサ及びセンサユニット

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4905701A (en) * 1988-06-15 1990-03-06 National Research Development Corporation Apparatus and method for detecting small changes in attached mass of piezoelectric devices used as sensors
GB8922601D0 (en) * 1989-10-06 1989-11-22 Rolls Royce Plc Thermal piezoelectric microbalance and method of using the same
GB2244557A (en) * 1990-06-01 1991-12-04 Marconi Gec Ltd Acoustic wave biosensor
DE19850801A1 (de) * 1998-11-04 2000-05-11 Bosch Gmbh Robert Verfahren und Vorrichtung zum Betrieb einer mikroakustischen Sensoranordnung
DE19850803A1 (de) 1998-11-04 2000-05-11 Bosch Gmbh Robert Sensoranordnung und ein Verfahren zur Ermittlung der Dichte und der Viskosität einer Flüssigkeit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4121467A (en) * 1977-05-31 1978-10-24 The United States Of America As Represented By The Secretary Of The Army Non-destructive technique for surface wave velocity measurement
US4312228A (en) * 1979-07-30 1982-01-26 Henry Wohltjen Methods of detection with surface acoustic wave and apparati therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2004086028A1 (ja) * 2003-03-26 2006-06-29 一司 山中 センサヘッド、ガスセンサ及びセンサユニット
JP2005331326A (ja) * 2004-05-19 2005-12-02 Japan Radio Co Ltd 弾性波センサ

Also Published As

Publication number Publication date
EP0239608A1 (fr) 1987-10-07
WO1987002134A1 (fr) 1987-04-09
NL8502634A (nl) 1987-04-16

Similar Documents

Publication Publication Date Title
US4216352A (en) Two coordinate position sensing systems
JPH01500052A (ja) 材料の状態特にその材料のガス又は液体の吸着を検出する装置
WO2013094208A1 (fr) Capteur de vitesse angulaire de type vibrant
JP2005195574A (ja) 角速度検出装置、角速度検出装置による角速度検出方法および角速度検出装置の製造方法
JP3130289B2 (ja) タッチ信号プローブ
KR970028443A (ko) 기계적 공진기를 구비한 속도 자이로스코프
TW201237374A (en) Vibration detecting device
JP3374775B2 (ja) 振動波センサ
JP3974766B2 (ja) 弾性表面波素子
JP2518814B2 (ja) 真空計
JP2001091206A (ja) タッチセンサ
JP7075110B2 (ja) 振動センサ
JPH1038913A (ja) 圧電発振素子
JPS62188975A (ja) 圧電体角速度センサ−
EP1709697B1 (fr) Procede permettant de determiner une position d'un element mobile ainsi qu'un moteur a ondes
JPS6246266A (ja) 振動センサ
JPH07239339A (ja) 角速度センサ
JPH0544615B2 (fr)
Matula et al. Electromagnetic acoustic wave transducer for the generation of acoustic evanescent waves on membranes and optical and capacitor wave‐number selective detectors
JP2005265795A (ja) 半導体力学量センサ
JP2002188973A (ja) 圧力センサ
JPH10332380A (ja) 角速度検出装置
JPS6033057A (ja) 加速度センサ
JPH055693Y2 (fr)
JPH1047941A (ja) タッチ信号プローブ