WO1987002134A1 - Appareil de determination de l'etat d'un materiau, en particulier l'adsorption d'un gaz ou d'un liquide sur ledit materiau - Google Patents

Appareil de determination de l'etat d'un materiau, en particulier l'adsorption d'un gaz ou d'un liquide sur ledit materiau Download PDF

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Publication number
WO1987002134A1
WO1987002134A1 PCT/NL1986/000030 NL8600030W WO8702134A1 WO 1987002134 A1 WO1987002134 A1 WO 1987002134A1 NL 8600030 W NL8600030 W NL 8600030W WO 8702134 A1 WO8702134 A1 WO 8702134A1
Authority
WO
WIPO (PCT)
Prior art keywords
assembly
electric
piezo
electrode assembly
condition
Prior art date
Application number
PCT/NL1986/000030
Other languages
English (en)
Inventor
Adrianus Venema
Original Assignee
Nederlandse Organisatie Voor Toegepast-Natuurweten
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nederlandse Organisatie Voor Toegepast-Natuurweten filed Critical Nederlandse Organisatie Voor Toegepast-Natuurweten
Publication of WO1987002134A1 publication Critical patent/WO1987002134A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves

Definitions

  • interdigital transducers For exciting such waves and recovering again electri ⁇ cal vibrations, use can be made of so-called interdigital transducers.
  • the latter comprise two comb-shaped electrodes made of metal foil on the surface of a piezo-electric wafer, the teeth of said electrodes being intercaleted said teeth having a width which is equal to 1/4 of the pitch of the teeth.
  • An elastic wave is produced then which is directed perpendicularly to the teeth, the wave-length thereof being equal to said pitch.
  • the amplitude of said vibration and the sharpness of resonance increase with the number of teeth.
  • the latter can, for instance, be included in an oscillator circuit which,because of a change - 2 - in the condition of the layer, and, hus, of the transit time of the elastic wave, will be more or less detuned.
  • Information in respect , ⁇ f the character of the adsorbed substance can be derived therefrom.
  • Such an apparatus can also be used for other changes in condition of the surface layer, or for mutual ⁇ ly comparing different kinds of surface layers.
  • the apparatus according to the invention for de ⁇ termining the condition of a material, and in particular the adsorption of a gas or liquid on this material comprises a substrate with a plane surface possessing, at least near said surface, piezo-electric characteristics, an electrode assembly provided on said surface and consisting of thin metallic layers in the form of two combs with mutually intercalated teeth, said assembly being adapted for applying thereto an electrical alternating voltage with an adapted frequency, in order to produce an elastic wave in the piezo-electric material directed transversely to said teeth, and at least one surface layer of the material of which the condition is to be determined, which is arranged laterally of said assembly on said surface, said apparatus being characterised in that, at both sides of the comb-shaped electrode assembly.
  • a mirror for the elastic waves produced by said assembly is arranged, said mirrors being, formed by substantially rectilinear surface variations extending parallel to the teeth of the electrodes, and being situated at such a distance from said electrode assembly that the waves reflected between said mirrors are in phase at said electrode assembly if the surface layer is in a given reference condition, said layer being provided at least between said - 3 - electrode assembly and one of said mirrors.
  • This structure is comparable to an interferometer known from optrics, and is extremely sensitive for small transit time differences between the electrode assembly and the mirrors. At a variation of the transit time, so that the different waves are no longer in phase, the energy storage in this system will change, which is sensed as an impedance variation by the electrical circuit causing the elastic vibration, and such variation can be easily detected. It is also possible to provide a second and similar electrode assembly at such a distance from the first one that, in the reference condition, the different waves will be in phase also there, which second assembly is connected with an electric measuring circuit. When, in this respect, reference is made to distances and points in which vibrations are in phase, this holds, of course, for points of the electrode assemblies which can be considered as a centre of vibration.
  • Said mirrors consist, in particular, of a plurality of parallel lines having a mutual distance of a whole number of quarter wave-lengths of the elastic wave in the reference condition of the surface layer, said number being chosen so that a substantially complete reflection is obtained.
  • Said mirror lines can consist of metallic layers provided on the piezo-electric surface, or of shallow grooves formed in said piezo-electric surface.
  • the piezo-electric surface can be in the form of a cover layer on a semiconductor substrate in which the associated circuits are integrated.
  • Fig. 1 a diagrammatic view of the basic shape of the apparatus of the invention
  • FIG. 2 a view at a larger scale of a portion of Fig. 1 ; and Fig. 3 a corresponding representation of a modified embodiment .
  • the apparatus of the invention comprises a wafer 1 of a piezo-electric material, or at least a piezo-electric covering layer on a suitable substrate, said covering layer 1 - 4 - having a sufficient thickness for being adapted to form there ⁇ in so-called Rayleigh-waves with a penetration depth of several ⁇ m.
  • interdigital electrode assembly 2 On this wafer 1 a so-called interdigital electrode assembly 2 is provided. A portion of such an assembly is shown in Fig. 2 at a larger scale. Beyond the portion of the wafer 1 below said assembly, said wafer 1 does not need to be piezo- electrical, so that, if the wafer 1 is not piezo-electrical itself, only at said assembly 2 a piezo-electric covering layer is to be provided.
  • the assembly 2 consists of two electrodes 3 and 4 each comprising a number of teeth 5.
  • the width of said teeth 5 is equal to the width of the interspaces between two teeth 5 of different electrodes 3 and 4. If a suitable alternating voltage is applied to said electrodes, in the surface portion of the wafer 1 an elastic wave is pro ⁇ quizd having a propagation direction which is directed per ⁇ pendicularly to the direction of the teeth 5.
  • the excitation frequency should be such that the wave-length, in view of the propagation velocity in the piezo-electric material, will be equal to four times the tooth width or the tooth pitch, and, in this respect, reference can be made to the literature, e.g. the publication of A.
  • the distance between the lines nearest to the assembly 2 and the centre point of this assembly 2 - 5 - equals a whole number ⁇ f half wave-lengths, and the distance between the parallel lines of each set equals a whole number of quarter wave-lengths.
  • Said lines operate as a mirror for the elastic wave.
  • a single line 7 will not produce a complete reflection, but a number of parallel lines at a distance of a whole number of quarter wave-lengths will provide an accor ⁇ dingly better reflection. In practice some tens of lines can provide a substantially complete reflection.
  • the elastic waves emitted by the electrode assembly 2 return, after reflection against the mirror lines 7, in phase with the emitted waves in the centre of the assembly 2. This will, then, operate as an interferometer, in which, in the tuned condition, a maximum energy storage occurs. However, as soon as the reflected waves do not arrive in phase in the centre point of the assembly 2, this energy is sharply reduced, which, in the electric circuit supplying the electrode assembly 2, will be sensed as a cor ⁇ responding impedance change, which can be detected in a simple manner.
  • the assembly 2 is shown in Fig. 2 half-way between the line assemblies 7; this is, of course, not necessary, as long as the distances in respect both line assemblies 7 are a whole multiple of the half wave-length.
  • a surface layer 8 is provided which is adapted to influence the elastic behaviour of the piezo-electric material.
  • the said interferometer tuning is, of course, adapted to the wave-length which occurs in the piezo-electric material provided with this layer.
  • Fig. 3 shows still an other embodiment in which a second electrode assembly 2' is provided satisfying the same phase requirements as the first assembly 2.
  • the assembly 2' is connected with an electric measuring circuit, and the assembly 2 only serves for excitation of the elastic vibration.
  • a piezo- electric layer 1 provided on a semiconductor substrate, which semiconductor substrate can be used, then, for forming therein integrated circuits which can be used for generating the electric vibrations and for measuring the occurring deviations.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

L'appareil ci-décrit destiné à la détection de l'état d'un matériau, en particulier l'adsorption d'un gaz ou d'un liquide sur ledit matériau, comprend un substrat avec une surface piézoélectrique plane et un assemblage d'électrodes consistant en des couches métalliques fines sous la forme de deux peignes ayant des dents intercalées mutuellement, sur lequel une tension à courant alternatif ayant une fréquence adaptée peut être appliqué pour produire une onde élastique dans le matériau piézoélectrique et, des deux côtés de l'assemblage à électrode en forme de peigne, un miroir est monté pour les ondes élastiques produites par ledit assemblage. Au moins entre cet assemblage et les miroirs est disposée une couche superficielle du matériau à examiner, et ce de telle sorte que les ondes réfléchies entre lesdits miroirs soient en phase au niveau dudit assemblage d'électrodes si la couche superficielle se trouve dans un état de référence donné. En particulier, un second assemblage d'électrodes similaire est prévu à une distance telle par rapport au premier assemblage que, dans l'état de référence, les ondes différentes y seront également en phase, ce second assemblage étant connecté à un circuit de mesure électrique.
PCT/NL1986/000030 1985-09-26 1986-09-26 Appareil de determination de l'etat d'un materiau, en particulier l'adsorption d'un gaz ou d'un liquide sur ledit materiau WO1987002134A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL8502634 1985-09-26
NL8502634A NL8502634A (nl) 1985-09-26 1985-09-26 Toestel voor het vaststellen van de toestand van een materiaal, in het bijzonder de adsorptie van een gas of vloeistof aan dit materiaal.

Publications (1)

Publication Number Publication Date
WO1987002134A1 true WO1987002134A1 (fr) 1987-04-09

Family

ID=19846619

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL1986/000030 WO1987002134A1 (fr) 1985-09-26 1986-09-26 Appareil de determination de l'etat d'un materiau, en particulier l'adsorption d'un gaz ou d'un liquide sur ledit materiau

Country Status (4)

Country Link
EP (1) EP0239608A1 (fr)
JP (1) JPH01500052A (fr)
NL (1) NL8502634A (fr)
WO (1) WO1987002134A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2219858A (en) * 1988-06-15 1989-12-20 Nat Res Dev Apparatus and method for detecting small changes in attached mass on piezoelectric devices used as sensors.
GB2236855A (en) * 1989-10-06 1991-04-17 Rolls Royce Plc Piezoelectric microbalance and method of using the same
EP0459613A1 (fr) * 1990-06-01 1991-12-04 Gec-Marconi Limited Biocapteurs
WO2000026659A1 (fr) * 1998-11-04 2000-05-11 Robert Bosch Gmbh Procede et dispositif pour faire fonctionner un systeme de detection microacoustique
WO2000026658A1 (fr) * 1998-11-04 2000-05-11 Robert Bosch Gmbh Systeme de detection et procede pour determiner la densite et la viscosite d'un liquide

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4611890B2 (ja) * 2003-03-26 2011-01-12 一司 山中 センサヘッド、ガスセンサ及びセンサユニット
JP2005331326A (ja) * 2004-05-19 2005-12-02 Japan Radio Co Ltd 弾性波センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4121467A (en) * 1977-05-31 1978-10-24 The United States Of America As Represented By The Secretary Of The Army Non-destructive technique for surface wave velocity measurement
US4312228A (en) * 1979-07-30 1982-01-26 Henry Wohltjen Methods of detection with surface acoustic wave and apparati therefor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4121467A (en) * 1977-05-31 1978-10-24 The United States Of America As Represented By The Secretary Of The Army Non-destructive technique for surface wave velocity measurement
US4312228A (en) * 1979-07-30 1982-01-26 Henry Wohltjen Methods of detection with surface acoustic wave and apparati therefor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
1985 International Conference on Solid-State Sensors and Actuators", 11 June 1985, (Philadelphia, US), S.J. MARTIN et al.: "Gas Sensing with Surface Acoustic wave Device", see pages 71-73 cited in the application *

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2219858A (en) * 1988-06-15 1989-12-20 Nat Res Dev Apparatus and method for detecting small changes in attached mass on piezoelectric devices used as sensors.
GB2236855A (en) * 1989-10-06 1991-04-17 Rolls Royce Plc Piezoelectric microbalance and method of using the same
EP0459613A1 (fr) * 1990-06-01 1991-12-04 Gec-Marconi Limited Biocapteurs
GB2244557A (en) * 1990-06-01 1991-12-04 Marconi Gec Ltd Acoustic wave biosensor
WO2000026659A1 (fr) * 1998-11-04 2000-05-11 Robert Bosch Gmbh Procede et dispositif pour faire fonctionner un systeme de detection microacoustique
WO2000026658A1 (fr) * 1998-11-04 2000-05-11 Robert Bosch Gmbh Systeme de detection et procede pour determiner la densite et la viscosite d'un liquide
US6304021B1 (en) 1998-11-04 2001-10-16 Robert Bosch Gmbh Method and apparatus for operating a microacoustic sensor array
AU748780B2 (en) * 1998-11-04 2002-06-13 Robert Bosch Gmbh Sensor array and method for determining the density and viscosity of a liquid
AU752276B2 (en) * 1998-11-04 2002-09-12 Robert Bosch Gmbh Method and device for operating a microacoustic sensor array
US6543274B1 (en) 1998-11-04 2003-04-08 Robert Bosch Gmbh Sensor array and method for determining the density and viscosity of a liquid
KR100706561B1 (ko) * 1998-11-04 2007-04-13 로베르트 보쉬 게엠베하 마이크로 음향 센서 장치를 작동시키기 위한 방법 및 장치

Also Published As

Publication number Publication date
EP0239608A1 (fr) 1987-10-07
NL8502634A (nl) 1987-04-16
JPH01500052A (ja) 1989-01-12

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