JPH0149048B2 - - Google Patents

Info

Publication number
JPH0149048B2
JPH0149048B2 JP57219929A JP21992982A JPH0149048B2 JP H0149048 B2 JPH0149048 B2 JP H0149048B2 JP 57219929 A JP57219929 A JP 57219929A JP 21992982 A JP21992982 A JP 21992982A JP H0149048 B2 JPH0149048 B2 JP H0149048B2
Authority
JP
Japan
Prior art keywords
lead
electrode
piezoelectric substrate
parts
vibrating electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57219929A
Other languages
Japanese (ja)
Other versions
JPS59108416A (en
Inventor
Takashi Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP21992982A priority Critical patent/JPS59108416A/en
Publication of JPS59108416A publication Critical patent/JPS59108416A/en
Publication of JPH0149048B2 publication Critical patent/JPH0149048B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks

Description

【発明の詳細な説明】 この発明は、2共振子型の圧電共振子とこの共
振子を製造する方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a two-resonator type piezoelectric resonator and a method for manufacturing this resonator.

圧電共振子、例えば厚み縦又は厚みすべり振動
を利用したエネルギー閉じ込め型の圧電磁器共振
子においては、プリント基板への実装時における
上下スペースの減少をはかるため、第1図および
第2図に示すように、上下高さHを小さくした低
背型構造がとられている。
A piezoelectric resonator, such as an energy-trapped piezoelectric ceramic resonator that utilizes thickness longitudinal or thickness shear vibration, is designed as shown in Figures 1 and 2 in order to reduce the vertical space when mounted on a printed circuit board. In addition, a low-profile structure with a small vertical height H is adopted.

上記低背型構造は、圧電基板1を横長の矩形状
に形成して上下の高さを切りつめ、圧電基板1の
両面に電極2を設け、両端にリード端子3,4を
半田付により接続し、基板1の側面をデイツプ外
装5により覆つたものであるが、このようなリー
ド端子3,4を半田付する構造では、半田付する
際半田が電極の振動電極部にまで伸びて振動の発
生を阻害することのないようにしなければならな
い。
The above-mentioned low-profile structure is obtained by forming the piezoelectric substrate 1 into a horizontally long rectangular shape, cutting down the vertical height, providing electrodes 2 on both sides of the piezoelectric substrate 1, and connecting lead terminals 3 and 4 to both ends by soldering. , the side surface of the board 1 is covered with a dip exterior 5, but in such a structure in which the lead terminals 3 and 4 are soldered, the solder extends to the vibrating electrode part of the electrode when soldering, causing vibration. must be ensured so as not to impede the

ところで、第1図に示した1共振子型の共振子
は、圧電基板1の両面に設けた電極2を、振動電
極部6と外部取出し端子部7と引出部8と逆配置
をもつて形成したものであるため、リード端子
3,4の半田付部分と振動電極部間の距離、即ち
引出部8の長さlを長くとることができ、半田付
の際振動電極部6にまで半田が伸びないので問題
にはならない。
By the way, in the single-resonator type resonator shown in FIG. 1, the electrodes 2 provided on both sides of the piezoelectric substrate 1 are formed with the vibrating electrode part 6, the external extraction terminal part 7, and the lead-out part 8 arranged in reverse. Therefore, the distance between the soldered parts of the lead terminals 3 and 4 and the vibrating electrode part, that is, the length l of the lead-out part 8, can be increased, and the solder does not reach the vibrating electrode part 6 during soldering. It doesn't stretch so it's not a problem.

しかしながら1共振子型共振子は、リード端子
3,4を半田付する外部取出し端子部7が圧電基
板1の相反する面にあるという欠点がある。
However, the one-resonator type resonator has a drawback in that the external terminal portions 7 to which the lead terminals 3 and 4 are soldered are located on opposite sides of the piezoelectric substrate 1.

これに対し、第2図に示した直列2共振型の共
振子は、圧電基板1の一面側に振動電極部6と外
部取出し端子部7と引出部8を2組設け、圧電基
板1の他面側に両振動電極部6,6と対応する対
向電極9を設けた構造であるため、リード端子
3,4を圧電基板1の一面側に揃えて取付けるこ
とができる。
On the other hand, the series two-resonance type resonator shown in FIG. Since the piezoelectric substrate 1 has a structure in which a counter electrode 9 corresponding to both vibrating electrode portions 6, 6 is provided on the surface side, the lead terminals 3, 4 can be aligned and attached to one surface side of the piezoelectric substrate 1.

しかし、直列2共振型の共振子は圧電基板1の
一面側に2個の振動電極部6を並べなければなら
ないので、引出部8の長さl′が極端に短かくなつ
てしまい、半田が振動電極部6にまで伸びるとい
う問題がある。
However, since the two-in-series resonator type resonator requires two vibrating electrode sections 6 to be lined up on one side of the piezoelectric substrate 1, the length l' of the lead-out section 8 becomes extremely short, and the solder There is a problem in that it extends to the vibrating electrode section 6.

この問題を解消するため、振動電極部6の間隔
l″を小さくし、引出部8の長さl′を大きくするこ
とが考えられるが、このような方法は両振動電極
部6の接近により2つの共振子が弾性結合するこ
とになり、所要の電気特性が得られなくなるた
め、間隔l″は弾性結合しない距離にしなければな
らず、引出部8の長さlを長くすることは困難で
ある。
In order to solve this problem, the interval between the vibrating electrode parts 6
It is conceivable to reduce l'' and increase the length l' of the lead-out portion 8, but such a method would result in elastic coupling between the two resonators due to the proximity of both vibrating electrode portions 6, and the required Since electrical characteristics cannot be obtained, the interval l'' must be set to a distance that does not result in elastic coupling, and it is difficult to increase the length l of the pull-out portion 8.

この発明は上記のような2共振型の圧電共振子
にあつた問題を解消するためになされたものであ
り、電極における引出部が長く、リード端子半田
付時の半田が振動電極部にまで達することのない
圧電共振子と、この圧電共振子を能率よく量産で
きる製造方法を提供することを目的とする。
This invention was made to solve the problems encountered with the two-resonance type piezoelectric resonator as described above, and the lead-out part of the electrode is long, and the solder when soldering the lead terminal reaches the vibrating electrode part. It is an object of the present invention to provide a piezoelectric resonator that is reliable and a manufacturing method that can efficiently mass-produce the piezoelectric resonator.

この発明の第1の構成は、圧電基板の一面側に
2個の振動電極部と両端に外部取出し端子部と、
振動電極部とその外部取出し端子部を接続する引
出部を、また他面側に両振動電極部と対応すると
ともに互いに接続された対向電極を設け、前記引
出部を圧電基板の側縁に沿うよう迂回させ、引出
部の距離を長くして、リード端子を接続する半田
が振動電極部に達することのないようにしたもの
である。
A first configuration of the present invention includes two vibrating electrode sections on one side of the piezoelectric substrate and external extraction terminal sections at both ends.
A lead-out part connecting the vibrating electrode part and its external terminal part is provided, and a counter electrode corresponding to both the vibrating electrode parts and connected to each other is provided on the other side, and the lead-out part is arranged along the side edge of the piezoelectric substrate. By making a detour and increasing the distance of the lead-out portion, the solder connecting the lead terminal does not reach the vibrating electrode portion.

この発明の第2の構成は、マザー圧電基板の一
面側に、2個の振動電極部とその両側に外部取出
し端子部と、振動電極部から相反する方向に延び
途中で外部取出し端子部に向けて屈曲する引出部
とで構成される複数の電極を、引出部が共通する
ように並べて設け、マザー圧電基板の他面側で各
電極の振動電極部と対応する位置に互いに接続さ
れた対向電極を施し、この後マザー圧電基板を各
電極ごとに引出部の位置で切断して圧電振動子を
切出し、切断時に位置ずれが生じても電極におけ
る引出部を確保できるようにしたものである。
A second configuration of the present invention has two vibrating electrode parts on one surface side of the mother piezoelectric substrate, external lead-out terminal parts on both sides thereof, and extending in opposite directions from the vibration electrode part, with a part extending toward the external lead-out terminal part. A plurality of electrodes are arranged so that the lead parts are common, and counter electrodes are connected to each other at positions corresponding to the vibrating electrode parts of each electrode on the other side of the mother piezoelectric substrate. After that, the mother piezoelectric substrate is cut at the position of the lead-out part for each electrode to cut out the piezoelectric vibrator, so that even if positional deviation occurs during cutting, the lead-out part of the electrode can be secured.

以下、この発明の実施例を添付図面の第3図と
第4図にもとづいて説明する。
Embodiments of the present invention will be described below with reference to FIGS. 3 and 4 of the accompanying drawings.

第3図のように、適当な大きさのマザー圧電基
板11を用意し、その一面側に複数組の電極12
を縦横に並べて形成する。
As shown in FIG. 3, a mother piezoelectric substrate 11 of an appropriate size is prepared, and multiple sets of electrodes 12 are placed on one side of the mother piezoelectric substrate 11.
Form by arranging them vertically and horizontally.

上記電極12は、弾性結合を起さない距離を隔
てて設けた2個の振動電極部13,13と、両振
動電極部13,13を挾んで両側に設けた外部取
出し端子部14,14と、各々の振動電極部13
とその外部取出し端子部14を接続する引出部1
5とで構成され、この引出部15は、振動電極部
13から相反する方向に向けて外部取出し端子部
14と平行するように延びる縦引出部15aと、
この縦引出部15aから外部取出し端子部14に
達するように折曲がる横引出部15bとで形成さ
れ、振動電極部13と外部取出し端子部14をL
字形に迂回する2本の引出部15によつて接続す
るようになつている。
The electrode 12 has two vibrating electrode parts 13, 13 provided apart from each other by a distance that does not cause elastic coupling, and external lead-out terminal parts 14, 14 provided on both sides sandwiching both the vibrating electrode parts 13, 13. , each vibrating electrode section 13
and a drawer part 1 for connecting the external extraction terminal part 14.
5, this lead-out part 15 includes a vertical lead-out part 15a extending in opposite directions from the vibrating electrode part 13 and parallel to the external extraction terminal part 14;
It is formed by a horizontal lead-out part 15b that is bent from the vertical lead-out part 15a to reach the external lead-out terminal part 14, and connects the vibrating electrode part 13 and the external lead-out terminal part 14 to
They are connected by two drawer portions 15 that detour in a letter shape.

上記電極12の引出部15はL字形の迂回によ
り距離を長くとることができ、圧電基板を長尺化
することなく、外部取出し端子部14にリード端
子を接続する半田が振動電極部13に伸びること
のない長さを得ることができる。
The lead-out portion 15 of the electrode 12 can have a long distance due to the L-shaped detour, and the solder connecting the lead terminal to the external extraction terminal portion 14 can extend to the vibrating electrode portion 13 without increasing the length of the piezoelectric substrate. You can get unprecedented length.

この電極12は第3図に示すように、上下にお
いて引出部15の横引出部15bが互につなが
り、両側は外部取出し端子部14が互いにつなが
るように、印刷等の手段で多数組を縦横に並べて
形成する。
As shown in FIG. 3, these electrodes 12 are formed into multiple sets by printing or other methods so that the horizontal lead-out parts 15b of the lead-out parts 15 are connected to each other on the upper and lower sides, and the external lead-out terminal parts 14 are connected to each other on both sides. Arrange and form.

また、マザー圧電基板11の他面側には各電極
12における振動電極部13,13と対応する位
置に、対向電極16,16とそれらを互いに接続
する電極16′とを一体的に設ける。
Further, on the other side of the mother piezoelectric substrate 11, counter electrodes 16, 16 and an electrode 16' connecting them to each other are integrally provided at positions corresponding to the vibrating electrode parts 13, 13 of each electrode 12.

このようにして両面に電極12と対向電極1
6,16′が設けられたマザー圧電基板11を各
電極12単位ごとにカツテイングホイールで縦横
に切断し、第4図に示す圧電振動子17を切出し
て行く。
In this way, the electrode 12 and the counter electrode 1 are placed on both sides.
The mother piezoelectric substrate 11 on which the electrodes 6 and 16' are provided is cut vertically and horizontally by a cutting wheel in units of each electrode 12, and the piezoelectric vibrator 17 shown in FIG. 4 is cut out.

マザー圧電基板11の切断位置は第3図一点鎖
線で示すように、隣接する電極12の外部引出し
端子部14および引出部15の横引出部15bを
各々二分するようにカツテイングする。
The cutting position of the mother piezoelectric substrate 11 is as shown by the dashed line in FIG. 3, so that the external lead terminal portion 14 of the adjacent electrode 12 and the horizontal lead portion 15b of the lead portion 15 are each cut into two.

例えば、カツテイング後の圧電振動子17の大
きさは、高さ2.4mm、幅6.7mm、厚さ0.7mm程度であ
り、この圧電振動子17における電極12の引出
部15の幅は0.1〜0.3mmと非常に細い幅である。
For example, the dimensions of the piezoelectric vibrator 17 after cutting are approximately 2.4 mm in height, 6.7 mm in width, and 0.7 mm in thickness, and the width of the lead-out portion 15 of the electrode 12 in this piezoelectric vibrator 17 is 0.1 to 0.3 mm. It has a very narrow width.

このため、引出部15が上下の一方にのみ形成
されていた場合、カツテイング時の僅かな位置ず
れによつて、引出部15の横引出部15bが断線
するか、または断線直前の状態になり、歩留りや
信頼性が低下することになる。
For this reason, if the drawer part 15 is formed only on one of the upper and lower sides, the horizontal drawer part 15b of the drawer part 15 will break or become in a state of being about to break due to a slight positional shift during cutting. Yield and reliability will decrease.

これに対してこの発明は、引出部15が振動電
極部13を挾んで2本形成しているので、切断位
置が何らかの原因でずれて、仮に第3図2点鎖線
で示す位置で切断されて、一方の引出部15が切
断された状態になつても他方の引出部15によつ
て振動電極13と外部取出し端子部14との接続
が保たれる。
On the other hand, in the present invention, since two lead-out portions 15 are formed between the vibrating electrode portion 13, if the cutting position shifts for some reason and is cut at the position shown by the two-dot chain line in FIG. Even if one of the lead-out parts 15 is disconnected, the connection between the vibrating electrode 13 and the external terminal part 14 is maintained by the other lead-out part 15.

切断後の圧電振動子17には両端の外部取出し
端子部14,14に各々リード端子18,19を
半田付によつて接続し、圧電基板の外周をデイツ
プ外装20で覆うことにより製品となる。
Lead terminals 18 and 19 are connected to the external terminal portions 14 and 14 at both ends of the cut piezoelectric vibrator 17 by soldering, respectively, and the outer periphery of the piezoelectric substrate is covered with a dip exterior 20 to complete the piezoelectric vibrator 17 as a product.

以上のように、この発明によると、矩形状に形
成された圧電基板の一面側に、2個の振動電極部
と外部取出し端子部および引出部を設け、他面側
に振動電極部と対応するとともに互いに接続され
た対向電極を設け、前記引出部を圧電基板の側縁
に沿つて迂回させたので、低背型の直列2共振型
圧電共振子において、圧電基板を長尺化すること
なく引出部を長くすることができ、外部取出し端
子部にリード端子を接続する半田が引出部をつた
わつて振動電極部の振動を阻害するようなエリア
まで伸びるようなことがなく、従つて小型で発振
精度の優れた直列2共振型の共振子を提供するこ
とができる。
As described above, according to the present invention, two vibrating electrode parts, an external extraction terminal part, and a lead-out part are provided on one side of a piezoelectric substrate formed in a rectangular shape, and the two vibrating electrode parts, an external extraction terminal part, and a lead-out part are provided on the other side of the piezoelectric substrate. In addition, counter electrodes connected to each other are provided, and the extraction portion is detoured along the side edge of the piezoelectric substrate. Therefore, in a low-profile series two-resonance type piezoelectric resonator, the piezoelectric substrate can be extracted without increasing its length. The solder that connects the lead terminal to the external extraction terminal does not extend to an area that would interfere with the vibration of the vibrating electrode by passing through the lead-out part, and the oscillation accuracy can be improved with a small size. It is possible to provide an excellent series two-resonance type resonator.

また、マザー圧電基板の一面側に、振動電極部
と外部取出し端子部および振動電極部から相反す
る方向に向かい途中で外部取出し端子部に向けて
折曲がる2本づゝの引出部とで構成された複数の
電極を、引出部がつながるように並べて設け、マ
ザー圧電基板の他面側で各電極の振動電極部と対
応する位置に互いに接続された対向電極を設け、
上記マザー圧電基板を各電極ごとに引出部の位置
で切断して圧電共振子を切出すようにしたので、
カツテイング時に位置ずれが生じても2本の引出
部の何れかは確実に残り、振動電極部と外部取出
し端子部の導通状態が確保でき引出部断線の発生
がなくなり、歩留りと信頼性の大幅な向上をはか
ることができる。
In addition, on one side of the mother piezoelectric substrate, there is a vibrating electrode part, an external lead-out terminal part, and two lead-out parts that go in opposite directions from the vibrating electrode part and bend halfway toward the external lead-out terminal part. A plurality of electrodes are arranged side by side so that the lead-out parts are connected, and counter electrodes connected to each other are provided at positions corresponding to the vibrating electrode parts of each electrode on the other side of the mother piezoelectric substrate,
The piezoelectric resonators were cut out by cutting the mother piezoelectric substrate at the position of the lead-out part for each electrode.
Even if misalignment occurs during cutting, one of the two lead-out parts will remain securely, ensuring continuity between the vibrating electrode part and the external terminal part, eliminating breakage of the lead-out part, and greatly improving yield and reliability. You can make improvements.

さらに、マザー圧電基板のカツテイングにおけ
る位置決め精度をゆるくすることができ、工数の
削減と作業の一般化により、圧電共振子を能率よ
く量産することができる。
Furthermore, the positioning accuracy in cutting the mother piezoelectric substrate can be relaxed, and piezoelectric resonators can be efficiently mass-produced by reducing the number of man-hours and generalizing the work.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来の1共振子型共振子の正面図、第
2図は同じく従来の2共振子型共振子の正面図、
第3図と第4図はこの発明の製造工程を示し、第
3図はマザー圧電基板に設けた電極を示す正面
図、第4図は出来上つた共振子の正面図である。 11……マザー圧電基板、12……電極、13
……振動電極部、14……外部取出し端子部、1
5……引出部、15a……縦引出部、15b……
横引出部、16……対向電極、17……圧電共振
子、18,19……リード端子、20……デイツ
プ外装。
Figure 1 is a front view of a conventional one-resonator type resonator, Figure 2 is a front view of a conventional two-resonator type resonator,
3 and 4 show the manufacturing process of the present invention, with FIG. 3 being a front view showing electrodes provided on the mother piezoelectric substrate, and FIG. 4 being a front view of the completed resonator. 11... Mother piezoelectric substrate, 12... Electrode, 13
... Vibration electrode part, 14 ... External extraction terminal part, 1
5...Drawer part, 15a...Vertical drawer part, 15b...
Lateral lead-out portion, 16... counter electrode, 17... piezoelectric resonator, 18, 19... lead terminal, 20... dip exterior.

Claims (1)

【特許請求の範囲】 1 矩形状に形成された圧電基板の一面側に、こ
の基板の両端に形成された外部取出し端子部と、
両取出し端子部間に形成された2個の振動電極部
と、各振動電極部とその外部取出し端子部を接続
するように形成された少なくとも2つ以上の引出
部とを設け、圧電基板の他面側に両振動電極部と
対応するとともに互いに接続された対向電極を設
け、前記振動電極部と外部取出し端子部を接続す
る引出部が圧電基板の両側縁に沿つて迂回するよ
うに形成されていることを特徴とする圧電共振
子。 2 一対の外部取出し端子部と、両取出し端子部
間に位置する2個の振動電極部と、振動電極部と
その外部取出し端子部を接続するため、振動電極
部から相反する方向に延び途中で外部取出し端子
部に向けて屈曲する引出部とで構成された電極
を、マザー圧電基板の一面側に引出部が共通とな
るように複数組を並べて設け、前記マザー圧電基
板の他面側に各電極の振動電極部と対応するとと
もに互いに接続された対向電極を設け、このマザ
ー圧電基板を各電極ごとに引出部と平行して切断
することを特徴とする圧電共振子の製造方法。
[Claims] 1. On one surface side of a piezoelectric substrate formed in a rectangular shape, external extraction terminal portions formed at both ends of this substrate;
Two vibrating electrode parts are formed between the two extraction terminal parts, and at least two or more extraction parts are formed to connect each vibration electrode part and the external extraction terminal part. A counter electrode is provided on the surface side that corresponds to both vibrating electrode parts and is connected to each other, and a lead-out part connecting the vibrating electrode part and the external lead-out terminal part is formed so as to detour along both side edges of the piezoelectric substrate. A piezoelectric resonator characterized by: 2. In order to connect the pair of external extraction terminal parts, the two vibrating electrode parts located between both extraction terminal parts, and the vibration electrode part and the external extraction terminal part, the vibration electrode part extends in opposite directions from the vibration electrode part, and A plurality of sets of electrodes each having a lead-out part bent toward an external extraction terminal part are arranged side by side on one side of the mother piezoelectric substrate so that the lead-out part is common, and each set is arranged on the other side of the mother piezoelectric substrate. A method for manufacturing a piezoelectric resonator, comprising: providing a counter electrode that corresponds to the vibrating electrode portion of the electrode and is connected to each other; and cutting the mother piezoelectric substrate parallel to the lead-out portion for each electrode.
JP21992982A 1982-12-14 1982-12-14 Piezoelectric resonator and its manufacture Granted JPS59108416A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21992982A JPS59108416A (en) 1982-12-14 1982-12-14 Piezoelectric resonator and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21992982A JPS59108416A (en) 1982-12-14 1982-12-14 Piezoelectric resonator and its manufacture

Publications (2)

Publication Number Publication Date
JPS59108416A JPS59108416A (en) 1984-06-22
JPH0149048B2 true JPH0149048B2 (en) 1989-10-23

Family

ID=16743226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21992982A Granted JPS59108416A (en) 1982-12-14 1982-12-14 Piezoelectric resonator and its manufacture

Country Status (1)

Country Link
JP (1) JPS59108416A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59195830U (en) * 1983-06-13 1984-12-26 東光株式会社 piezoelectric vibrator
JPH0197622U (en) * 1987-12-19 1989-06-29
JPH0230634U (en) * 1988-08-18 1990-02-27
JP2605406B2 (en) * 1989-07-20 1997-04-30 株式会社村田製作所 Manufacturing method of piezoelectric resonator

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227020A (en) * 1975-08-25 1977-03-01 Budd Co Method and device for casting metal
JPS55652A (en) * 1978-06-16 1980-01-07 Seiko Instr & Electronics Ltd Electrode structure of thickness shear oscillator
JPS5626345U (en) * 1979-08-07 1981-03-11

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449875U (en) * 1977-09-13 1979-04-06

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5227020A (en) * 1975-08-25 1977-03-01 Budd Co Method and device for casting metal
JPS55652A (en) * 1978-06-16 1980-01-07 Seiko Instr & Electronics Ltd Electrode structure of thickness shear oscillator
JPS5626345U (en) * 1979-08-07 1981-03-11

Also Published As

Publication number Publication date
JPS59108416A (en) 1984-06-22

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