JPH0147404B2 - - Google Patents

Info

Publication number
JPH0147404B2
JPH0147404B2 JP58074004A JP7400483A JPH0147404B2 JP H0147404 B2 JPH0147404 B2 JP H0147404B2 JP 58074004 A JP58074004 A JP 58074004A JP 7400483 A JP7400483 A JP 7400483A JP H0147404 B2 JPH0147404 B2 JP H0147404B2
Authority
JP
Japan
Prior art keywords
carbon
halogen atom
electrical conductivity
thermal decomposition
pyrolysis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58074004A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59203716A (ja
Inventor
Kazumoto Murase
Toshihiro Oonishi
Masanobu Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP58074004A priority Critical patent/JPS59203716A/ja
Publication of JPS59203716A publication Critical patent/JPS59203716A/ja
Publication of JPH0147404B2 publication Critical patent/JPH0147404B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Conductive Materials (AREA)
JP58074004A 1983-04-28 1983-04-28 高導電性炭素系熱処理物 Granted JPS59203716A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58074004A JPS59203716A (ja) 1983-04-28 1983-04-28 高導電性炭素系熱処理物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58074004A JPS59203716A (ja) 1983-04-28 1983-04-28 高導電性炭素系熱処理物

Publications (2)

Publication Number Publication Date
JPS59203716A JPS59203716A (ja) 1984-11-17
JPH0147404B2 true JPH0147404B2 (enrdf_load_stackoverflow) 1989-10-13

Family

ID=13534491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58074004A Granted JPS59203716A (ja) 1983-04-28 1983-04-28 高導電性炭素系熱処理物

Country Status (1)

Country Link
JP (1) JPS59203716A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS59203716A (ja) 1984-11-17

Similar Documents

Publication Publication Date Title
JP5674527B2 (ja) 高温ガスとの接触に適した装置
JP2854201B2 (ja) シリコン結晶の製造に使用するガラス質炭素被覆グラファイト部品およびその製造方法
US4131697A (en) Method of coating carbon filaments with silicon carbide
JPS6221867B2 (enrdf_load_stackoverflow)
US3014815A (en) Method of providing articles with metal oxide layers
EP0529593A1 (en) A glass carbon coated graphite chuck for use in producing polycrystalline silicon
US5275844A (en) Process for forming a crack-free boron nitride coating on a carbon structure
US2901381A (en) Method of making electrical resistors
JPH0147404B2 (enrdf_load_stackoverflow)
JPH05502656A (ja) 低温熱分解によるグラファイトフレークおよびフィルムの調製方法
JP4736076B2 (ja) SiC膜被覆ガラス状炭素材およびその製造方法
EP0492159B1 (en) Metal growth accelerator shell for the chemical vaporization deposition of diamond
JPH0147405B2 (enrdf_load_stackoverflow)
US4673720A (en) Electroconductive polymer and process for preparation thereof
JPS63166789A (ja) シリコン単結晶引上装置用黒鉛製ルツボとその製造方法
JPS6262188B2 (enrdf_load_stackoverflow)
JPS59232904A (ja) 導電性薄膜の製造方法
JP2003183076A (ja) 熱分解炭素または黒鉛被覆炭素材料の製造方法
US1094352A (en) Refractory fibrous material and process of making the same.
JP2734013B2 (ja) 断熱方法
KR910000293B1 (ko) SiO 발생 속도 조절에 의한 탄화규소 피복 흑연의 제조 방법
JPH03295880A (ja) 炭化珪素質部材及びその製造方法
JPS62190217A (ja) 導電性生成物の製造方法
JPH0717468B2 (ja) 熱分解炭素被覆黒鉛材の製造法
JPH0684276B2 (ja) 単結晶引き上げ装置用ガス整流部材