JPH0145861B2 - - Google Patents
Info
- Publication number
- JPH0145861B2 JPH0145861B2 JP11621382A JP11621382A JPH0145861B2 JP H0145861 B2 JPH0145861 B2 JP H0145861B2 JP 11621382 A JP11621382 A JP 11621382A JP 11621382 A JP11621382 A JP 11621382A JP H0145861 B2 JPH0145861 B2 JP H0145861B2
- Authority
- JP
- Japan
- Prior art keywords
- mtf
- magnification
- optical system
- test chart
- lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 17
- 230000003287 optical effect Effects 0.000 claims description 16
- 238000005259 measurement Methods 0.000 claims description 12
- 238000003384 imaging method Methods 0.000 claims description 4
- 230000001131 transforming effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 9
- 238000004364 calculation method Methods 0.000 description 7
- 238000013461 design Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000012935 Averaging Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 102100027340 Slit homolog 2 protein Human genes 0.000 description 1
- 101710133576 Slit homolog 2 protein Proteins 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000005316 response function Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11621382A JPS597240A (ja) | 1982-07-06 | 1982-07-06 | Mtf測定機 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11621382A JPS597240A (ja) | 1982-07-06 | 1982-07-06 | Mtf測定機 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS597240A JPS597240A (ja) | 1984-01-14 |
JPH0145861B2 true JPH0145861B2 (enrdf_load_stackoverflow) | 1989-10-05 |
Family
ID=14681632
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11621382A Granted JPS597240A (ja) | 1982-07-06 | 1982-07-06 | Mtf測定機 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS597240A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60160293A (ja) * | 1984-01-31 | 1985-08-21 | Victor Co Of Japan Ltd | デイスプレイの空間周波数特性測定装置 |
JP2015175822A (ja) * | 2014-03-18 | 2015-10-05 | 富士通株式会社 | 焦点距離の測定方法および測定装置 |
JP2015184255A (ja) * | 2014-03-26 | 2015-10-22 | 富士通株式会社 | 焦点距離の測定方法および測定装置 |
-
1982
- 1982-07-06 JP JP11621382A patent/JPS597240A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS597240A (ja) | 1984-01-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5193120A (en) | Machine vision three dimensional profiling system | |
EP1063570B1 (en) | In situ projection optic metrology method and apparatus | |
US4703434A (en) | Apparatus for measuring overlay error | |
JPH04220510A (ja) | 物体表面を非接触形式で測定する方法および装置 | |
KR102520401B1 (ko) | 노광 장치 및 물품 제조 방법 | |
JP2000121498A (ja) | 結像性能の評価方法及び装置 | |
JPH0328691B2 (enrdf_load_stackoverflow) | ||
EP0502162B1 (en) | Moire distance measurements using a grating printed on or attached to a surface | |
JPH0145861B2 (enrdf_load_stackoverflow) | ||
EP4404554A1 (en) | Intrinsic parameter calibration system | |
JP3595117B2 (ja) | アレイ素子検査方法およびアレイ素子検査装置 | |
JPH0562882A (ja) | 結像位置測定方法 | |
JP7191632B2 (ja) | 偏心量測定方法 | |
KR100601661B1 (ko) | 주사 시스템의 선형 상점 속도 또는 위치 변화 측정 방법및 장치 | |
Mallick et al. | Speckle-pattern interferometry applied to the study of phase objects | |
JP2001166202A (ja) | 焦点検出方法及び焦点検出装置 | |
JP4828737B2 (ja) | Mtf測定装置 | |
JPS5861436A (ja) | 投影型mtf測定装置の受光素子 | |
CN112130417A (zh) | 一种波像差测量方法、波像差测量装置及光刻机 | |
Webb | Measurement Of Optical Performance Of Photolithographic Lenses | |
JPS587824A (ja) | アライメント方法およびその装置 | |
JPH04313042A (ja) | Otf測定装置 | |
JPH0545132B2 (enrdf_load_stackoverflow) | ||
JPH1038559A (ja) | 距離測定方法 | |
GB1601642A (en) | Apparatus for measuring optical transfer function |