JPS597240A - Ｍｔｆ測定機 - Google Patents

Ｍｔｆ測定機

Info

Publication number
JPS597240A
JPS597240A JP11621382A JP11621382A JPS597240A JP S597240 A JPS597240 A JP S597240A JP 11621382 A JP11621382 A JP 11621382A JP 11621382 A JP11621382 A JP 11621382A JP S597240 A JPS597240 A JP S597240A
Authority
JP
Japan
Prior art keywords
mtf
magnification
lens
optical system
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11621382A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0145861B2 (enrdf_load_stackoverflow
Inventor
Junichi Kitabayashi
淳一 北林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP11621382A priority Critical patent/JPS597240A/ja
Publication of JPS597240A publication Critical patent/JPS597240A/ja
Publication of JPH0145861B2 publication Critical patent/JPH0145861B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
JP11621382A 1982-07-06 1982-07-06 Ｍｔｆ測定機 Granted JPS597240A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11621382A JPS597240A (ja) 1982-07-06 1982-07-06 Ｍｔｆ測定機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11621382A JPS597240A (ja) 1982-07-06 1982-07-06 Ｍｔｆ測定機

Publications (2)

Publication Number Publication Date
JPS597240A true JPS597240A (ja) 1984-01-14
JPH0145861B2 JPH0145861B2 (enrdf_load_stackoverflow) 1989-10-05

Family

ID=14681632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11621382A Granted JPS597240A (ja) 1982-07-06 1982-07-06 Ｍｔｆ測定機

Country Status (1)

Country Link
JP (1) JPS597240A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160293A (ja) * 1984-01-31 1985-08-21 Victor Co Of Japan Ltd デイスプレイの空間周波数特性測定装置
JP2015175822A (ja) * 2014-03-18 2015-10-05 富士通株式会社 焦点距離の測定方法および測定装置
JP2015184255A (ja) * 2014-03-26 2015-10-22 富士通株式会社 焦点距離の測定方法および測定装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160293A (ja) * 1984-01-31 1985-08-21 Victor Co Of Japan Ltd デイスプレイの空間周波数特性測定装置
JP2015175822A (ja) * 2014-03-18 2015-10-05 富士通株式会社 焦点距離の測定方法および測定装置
JP2015184255A (ja) * 2014-03-26 2015-10-22 富士通株式会社 焦点距離の測定方法および測定装置

Also Published As

Publication number Publication date
JPH0145861B2 (enrdf_load_stackoverflow) 1989-10-05

Similar Documents

Publication Publication Date Title
US4641962A (en) Aberration measuring method
TWI764013B (zh) 曝光裝置及物品製造方法
JP3150404B2 (ja) 光学系における屈折力の測定方法および測定装置
US4602153A (en) Focus detection apparatus for a camera
JP2000121498A (ja) 結像性能の評価方法及び装置
JPH0328691B2 (enrdf_load_stackoverflow)
JPS597240A (ja) Ｍｔｆ測定機
CN104880913A (zh) 一种提高工艺适应性的调焦调平系统
US6323945B1 (en) Coma aberration automatic measuring mark and measuring method
JPH034858B2 (enrdf_load_stackoverflow)
EP0157431A1 (en) Procedure to measure the dimensions of a body in movement in a three-dimensional field, and an optoelectronic device to carry out such procedure
JP2864171B2 (ja) 観察光学系
JPS5861436A (ja) 投影型ｍｔｆ測定装置の受光素子
CN111045220A (zh) 一种变焦光学系统光轴与视轴对准方法
JPS6289010A (ja) 顕微鏡自動焦点装置
KR20050051527A (ko) 주사 시스템의 선형 상점 속도 또는 위치 변화 측정 방법및 장치
SU1703972A1 (ru) Способ калибровки изображений стереофотограмметрической системы
JPS6360335B2 (enrdf_load_stackoverflow)
JPH01242905A (ja) 視覚装置における実寸法計測方法
JPS60249323A (ja) 縮小投影露光装置
JP3554106B2 (ja) 画像処理装置
JPS6129732A (ja) Ｍｔｆ測定装置
JPS5854311A (ja) 可変焦点光学系
JPS599537A (ja) Ｍｔｆ測定方法
JPS5885132A (ja) レンズのｍｔｆ測定装置