JPH0143454B2 - - Google Patents
Info
- Publication number
- JPH0143454B2 JPH0143454B2 JP54126686A JP12668679A JPH0143454B2 JP H0143454 B2 JPH0143454 B2 JP H0143454B2 JP 54126686 A JP54126686 A JP 54126686A JP 12668679 A JP12668679 A JP 12668679A JP H0143454 B2 JPH0143454 B2 JP H0143454B2
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- substrate
- compound semiconductor
- gaas
- compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12668679A JPS5650520A (en) | 1979-10-01 | 1979-10-01 | Processing method of semiconductor substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12668679A JPS5650520A (en) | 1979-10-01 | 1979-10-01 | Processing method of semiconductor substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5650520A JPS5650520A (en) | 1981-05-07 |
| JPH0143454B2 true JPH0143454B2 (enrdf_load_stackoverflow) | 1989-09-20 |
Family
ID=14941337
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12668679A Granted JPS5650520A (en) | 1979-10-01 | 1979-10-01 | Processing method of semiconductor substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5650520A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6130030A (ja) * | 1984-07-12 | 1986-02-12 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 多元素半導体のアニ−ル方法 |
| US4820651A (en) * | 1985-11-01 | 1989-04-11 | Gte Laboratories Incorporated | Method of treating bodies of III-V compound semiconductor material |
| JPS63248127A (ja) * | 1987-04-02 | 1988-10-14 | Nec Corp | ＩｎＰ基板の熱処理方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS492511A (enrdf_load_stackoverflow) * | 1972-04-20 | 1974-01-10 | ||
| JPS54162451A (en) * | 1978-06-13 | 1979-12-24 | Matsushita Electric Ind Co Ltd | Heat treatment method of compound semiconductor and its heat treatment unit |
-
1979
- 1979-10-01 JP JP12668679A patent/JPS5650520A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5650520A (en) | 1981-05-07 |
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