JPH0142618B2 - - Google Patents
Info
- Publication number
- JPH0142618B2 JPH0142618B2 JP58112877A JP11287783A JPH0142618B2 JP H0142618 B2 JPH0142618 B2 JP H0142618B2 JP 58112877 A JP58112877 A JP 58112877A JP 11287783 A JP11287783 A JP 11287783A JP H0142618 B2 JPH0142618 B2 JP H0142618B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- temperature
- semiconductor
- substrate
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P14/3802—
-
- H10P14/3411—
Landscapes
- Recrystallisation Techniques (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58112877A JPS605508A (ja) | 1983-06-24 | 1983-06-24 | 半導体結晶薄膜の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58112877A JPS605508A (ja) | 1983-06-24 | 1983-06-24 | 半導体結晶薄膜の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS605508A JPS605508A (ja) | 1985-01-12 |
| JPH0142618B2 true JPH0142618B2 (OSRAM) | 1989-09-13 |
Family
ID=14597762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58112877A Granted JPS605508A (ja) | 1983-06-24 | 1983-06-24 | 半導体結晶薄膜の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS605508A (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63203814A (ja) * | 1987-02-18 | 1988-08-23 | Murata Mach Ltd | 紡糸捲取機 |
| JPH06124913A (ja) | 1992-06-26 | 1994-05-06 | Semiconductor Energy Lab Co Ltd | レーザー処理方法 |
| EP0619877A1 (en) * | 1992-11-03 | 1994-10-19 | Interuniversitair Micro-Elektronica Centrum Vzw | System for the controlled heating of an object |
| US7438468B2 (en) * | 2004-11-12 | 2008-10-21 | Applied Materials, Inc. | Multiple band pass filtering for pyrometry in laser based annealing systems |
-
1983
- 1983-06-24 JP JP58112877A patent/JPS605508A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS605508A (ja) | 1985-01-12 |
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