JPH0142135B2 - - Google Patents

Info

Publication number
JPH0142135B2
JPH0142135B2 JP54014035A JP1403579A JPH0142135B2 JP H0142135 B2 JPH0142135 B2 JP H0142135B2 JP 54014035 A JP54014035 A JP 54014035A JP 1403579 A JP1403579 A JP 1403579A JP H0142135 B2 JPH0142135 B2 JP H0142135B2
Authority
JP
Japan
Prior art keywords
sample
movable body
container
receiving surface
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54014035A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55107230A (en
Inventor
Makoto Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP1403579A priority Critical patent/JPS55107230A/ja
Publication of JPS55107230A publication Critical patent/JPS55107230A/ja
Publication of JPH0142135B2 publication Critical patent/JPH0142135B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1403579A 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like Granted JPS55107230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1403579A JPS55107230A (en) 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1403579A JPS55107230A (en) 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like

Publications (2)

Publication Number Publication Date
JPS55107230A JPS55107230A (en) 1980-08-16
JPH0142135B2 true JPH0142135B2 (enExample) 1989-09-11

Family

ID=11849874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1403579A Granted JPS55107230A (en) 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like

Country Status (1)

Country Link
JP (1) JPS55107230A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142636A (en) * 1980-04-07 1981-11-07 Toshiba Corp Holding mechanism for cassette of electron ray device
JPS57201023A (en) * 1981-06-04 1982-12-09 Toshiba Mach Co Ltd Cassette holder for electron beam drawing apparatus
DE102014110724B4 (de) * 2014-07-29 2016-09-01 European Molecular Biology Laboratory Manipulationsbehälter für die Kryo-Mikroskopie

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257567A (en) * 1975-11-05 1977-05-12 Hitachi Chem Co Ltd Method and apparatus for grinding mica pieces
JPS52137775A (en) * 1976-05-14 1977-11-17 Toshiba Corp Method of assembling rotary drum for gas centrifugal separator
JPS5454580A (en) * 1977-10-11 1979-04-28 Hitachi Ltd Cassette chucking device in electron beam lithography apparatus

Also Published As

Publication number Publication date
JPS55107230A (en) 1980-08-16

Similar Documents

Publication Publication Date Title
US6427973B1 (en) Vacuum system with a vacuum plate valve
JPS6232042B2 (enExample)
JPH07174290A (ja) 箱体の壁に断熱粉末を充填する方法
US3804397A (en) Automatic positioning vacuum cup
US5798126A (en) Sealing device for high pressure vessel
TW202020958A (zh) 基板保持裝置、基板吸附判定方法、基板研磨裝置、基板研磨方法、從被研磨晶圓之頂面去除液體的方法、用以按壓晶圓於研磨墊的彈性膜、基板放開方法及定量氣體供給裝置
JPH1187468A (ja) ウエハ状の物品を処理する方法及び支持装置
TW201604457A (zh) 閘閥
JPH0142135B2 (enExample)
EP0609327B1 (en) Processing system
US5602058A (en) Method and apparatus for applying a wafer to a mount plate
US20080014075A1 (en) Vacuum gripping system for positioning large thin substrates on a support table
JPH0599350A (ja) 管路切換装置
EP0478858B1 (en) Apparatus for dispensing a product at a constant pressure
US2831510A (en) Filling machine for open mouth bags
CN109605739A (zh) 用于添加式地制造三维物体的设备的粉末模块装置
EP0436770B1 (en) Non-sliding gate valve for high vacuum use
JP2002303372A (ja) ゲートバルブ並びに真空処理装置および方法
JPH03239884A (ja) 超高真空ゲート弁
GB1420412A (en) Self-monitoring pressure or temperature sensing device
JP2024024420A (ja) チャンバ、蓋及びリークテスタ
SU1328151A1 (ru) Транспортный спутник
US2892313A (en) Clamping device for molding apparatus
JPH0429602A (ja) 負荷を有する空圧シリンダの長期停止時の制御方法
JPS6246956Y2 (enExample)