JPS55107230A - Sample holder in electron ray exposing device and the like - Google Patents
Sample holder in electron ray exposing device and the likeInfo
- Publication number
- JPS55107230A JPS55107230A JP1403579A JP1403579A JPS55107230A JP S55107230 A JPS55107230 A JP S55107230A JP 1403579 A JP1403579 A JP 1403579A JP 1403579 A JP1403579 A JP 1403579A JP S55107230 A JPS55107230 A JP S55107230A
- Authority
- JP
- Japan
- Prior art keywords
- movable member
- holder
- vessel
- exposure
- sample holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To improve the exposure accuracy by fixing a sample holder by the pressing force of an elastic member, releasing and leading out the pressing force and removing a force applied to a shifting mechanism at the time of sample exchange.
CONSTITUTION: At the time of exposure, metal fittings 15 are separated from a pipe 16, and the interior of a vessel 13a is communicated with the interior of a sample chamber 1 to balance the internal and external pressures of the vessel. A pressing member 8a presses a sample holder 6 against a receiving plate 5a through a projection 10a by a spring 11a to fix the sample holder 6 to a movable member 2. After the exposure, when the movable member 2 moves to a predetermined position, a bar 21 is driven 22, and metal fittings 15 are pressed against a pipe 16 and connected thereto. By operating a valve 24b the vessel 13a is stretched by a gaseous pressure and the pressure of the holder 6 to the movable member 2 is released thereby to carry out the attachment and detachment of the holder 6 to and from the movable member 2. After loading, the valve 24a is operated to exhaust gas and the internal and external pressures of the vessel 13a are balanced to fix the holder to the receiving plate, and the bar 21 is caused to descend and the pressing force of the metal fittings is released to shift the movable member 2 to an exposure starting position. According to this organization, no force is applied to the shifting mechanism, and therefore no deviation is generated, thus the exposure accuracy being improved.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1403579A JPS55107230A (en) | 1979-02-09 | 1979-02-09 | Sample holder in electron ray exposing device and the like |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1403579A JPS55107230A (en) | 1979-02-09 | 1979-02-09 | Sample holder in electron ray exposing device and the like |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55107230A true JPS55107230A (en) | 1980-08-16 |
JPH0142135B2 JPH0142135B2 (en) | 1989-09-11 |
Family
ID=11849874
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1403579A Granted JPS55107230A (en) | 1979-02-09 | 1979-02-09 | Sample holder in electron ray exposing device and the like |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55107230A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56142636A (en) * | 1980-04-07 | 1981-11-07 | Toshiba Corp | Holding mechanism for cassette of electron ray device |
JPS57201023A (en) * | 1981-06-04 | 1982-12-09 | Toshiba Mach Co Ltd | Cassette holder for electron beam drawing apparatus |
JP2016031928A (en) * | 2014-07-29 | 2016-03-07 | ライカ ミクロジュステーメ ゲーエムベーハー | Manipulation container for cryomicroscopy |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5257567A (en) * | 1975-11-05 | 1977-05-12 | Hitachi Chem Co Ltd | Method and apparatus for grinding mica pieces |
JPS52137775A (en) * | 1976-05-14 | 1977-11-17 | Toshiba Corp | Method of assembling rotary drum for gas centrifugal separator |
JPS5454580A (en) * | 1977-10-11 | 1979-04-28 | Hitachi Ltd | Cassette chucking device in electron beam lithography apparatus |
-
1979
- 1979-02-09 JP JP1403579A patent/JPS55107230A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5257567A (en) * | 1975-11-05 | 1977-05-12 | Hitachi Chem Co Ltd | Method and apparatus for grinding mica pieces |
JPS52137775A (en) * | 1976-05-14 | 1977-11-17 | Toshiba Corp | Method of assembling rotary drum for gas centrifugal separator |
JPS5454580A (en) * | 1977-10-11 | 1979-04-28 | Hitachi Ltd | Cassette chucking device in electron beam lithography apparatus |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56142636A (en) * | 1980-04-07 | 1981-11-07 | Toshiba Corp | Holding mechanism for cassette of electron ray device |
JPH0322047B2 (en) * | 1980-04-07 | 1991-03-26 | Toshiba Kk | |
JPS57201023A (en) * | 1981-06-04 | 1982-12-09 | Toshiba Mach Co Ltd | Cassette holder for electron beam drawing apparatus |
JP2016031928A (en) * | 2014-07-29 | 2016-03-07 | ライカ ミクロジュステーメ ゲーエムベーハー | Manipulation container for cryomicroscopy |
US10144010B2 (en) | 2014-07-29 | 2018-12-04 | Leica Mikrosysteme Gmbh | Manipulation holder for cryomicroscopy |
Also Published As
Publication number | Publication date |
---|---|
JPH0142135B2 (en) | 1989-09-11 |
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