JPS55107230A - Sample holder in electron ray exposing device and the like - Google Patents

Sample holder in electron ray exposing device and the like

Info

Publication number
JPS55107230A
JPS55107230A JP1403579A JP1403579A JPS55107230A JP S55107230 A JPS55107230 A JP S55107230A JP 1403579 A JP1403579 A JP 1403579A JP 1403579 A JP1403579 A JP 1403579A JP S55107230 A JPS55107230 A JP S55107230A
Authority
JP
Japan
Prior art keywords
movable member
holder
vessel
exposure
sample holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1403579A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0142135B2 (enExample
Inventor
Makoto Tamai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP1403579A priority Critical patent/JPS55107230A/ja
Publication of JPS55107230A publication Critical patent/JPS55107230A/ja
Publication of JPH0142135B2 publication Critical patent/JPH0142135B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1403579A 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like Granted JPS55107230A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1403579A JPS55107230A (en) 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1403579A JPS55107230A (en) 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like

Publications (2)

Publication Number Publication Date
JPS55107230A true JPS55107230A (en) 1980-08-16
JPH0142135B2 JPH0142135B2 (enExample) 1989-09-11

Family

ID=11849874

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1403579A Granted JPS55107230A (en) 1979-02-09 1979-02-09 Sample holder in electron ray exposing device and the like

Country Status (1)

Country Link
JP (1) JPS55107230A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142636A (en) * 1980-04-07 1981-11-07 Toshiba Corp Holding mechanism for cassette of electron ray device
JPS57201023A (en) * 1981-06-04 1982-12-09 Toshiba Mach Co Ltd Cassette holder for electron beam drawing apparatus
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257567A (en) * 1975-11-05 1977-05-12 Hitachi Chem Co Ltd Method and apparatus for grinding mica pieces
JPS52137775A (en) * 1976-05-14 1977-11-17 Toshiba Corp Method of assembling rotary drum for gas centrifugal separator
JPS5454580A (en) * 1977-10-11 1979-04-28 Hitachi Ltd Cassette chucking device in electron beam lithography apparatus

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5257567A (en) * 1975-11-05 1977-05-12 Hitachi Chem Co Ltd Method and apparatus for grinding mica pieces
JPS52137775A (en) * 1976-05-14 1977-11-17 Toshiba Corp Method of assembling rotary drum for gas centrifugal separator
JPS5454580A (en) * 1977-10-11 1979-04-28 Hitachi Ltd Cassette chucking device in electron beam lithography apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56142636A (en) * 1980-04-07 1981-11-07 Toshiba Corp Holding mechanism for cassette of electron ray device
JPS57201023A (en) * 1981-06-04 1982-12-09 Toshiba Mach Co Ltd Cassette holder for electron beam drawing apparatus
JP2016031928A (ja) * 2014-07-29 2016-03-07 ライカ ミクロジュステーメ ゲーエムベーハー クライオ顕微鏡法のための操作容器
US10144010B2 (en) 2014-07-29 2018-12-04 Leica Mikrosysteme Gmbh Manipulation holder for cryomicroscopy

Also Published As

Publication number Publication date
JPH0142135B2 (enExample) 1989-09-11

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