JPH0141496B2 - - Google Patents

Info

Publication number
JPH0141496B2
JPH0141496B2 JP56006323A JP632381A JPH0141496B2 JP H0141496 B2 JPH0141496 B2 JP H0141496B2 JP 56006323 A JP56006323 A JP 56006323A JP 632381 A JP632381 A JP 632381A JP H0141496 B2 JPH0141496 B2 JP H0141496B2
Authority
JP
Japan
Prior art keywords
film
deposited
metal
vacuum
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56006323A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57120434A (en
Inventor
Takuo Adachi
Atsushi Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Metallizing Co Ltd
Original Assignee
Toyo Metallizing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Metallizing Co Ltd filed Critical Toyo Metallizing Co Ltd
Priority to JP56006323A priority Critical patent/JPS57120434A/ja
Publication of JPS57120434A publication Critical patent/JPS57120434A/ja
Publication of JPH0141496B2 publication Critical patent/JPH0141496B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
JP56006323A 1981-01-21 1981-01-21 Method and apparatus for manufacturing stacked film Granted JPS57120434A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56006323A JPS57120434A (en) 1981-01-21 1981-01-21 Method and apparatus for manufacturing stacked film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56006323A JPS57120434A (en) 1981-01-21 1981-01-21 Method and apparatus for manufacturing stacked film

Publications (2)

Publication Number Publication Date
JPS57120434A JPS57120434A (en) 1982-07-27
JPH0141496B2 true JPH0141496B2 (OSRAM) 1989-09-06

Family

ID=11635152

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56006323A Granted JPS57120434A (en) 1981-01-21 1981-01-21 Method and apparatus for manufacturing stacked film

Country Status (1)

Country Link
JP (1) JPS57120434A (OSRAM)

Also Published As

Publication number Publication date
JPS57120434A (en) 1982-07-27

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