Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac IncfiledCriticalUlvac Inc
Priority to JP57195235ApriorityCriticalpatent/JPS5986143A/ja
Publication of JPS5986143ApublicationCriticalpatent/JPS5986143A/ja
Publication of JPH0140467B2publicationCriticalpatent/JPH0140467B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
H01J37/3411—Constructional aspects of the reactor
H01J37/3435—Target holders (includes backing plates and endblocks)