JPH0140064Y2 - - Google Patents

Info

Publication number
JPH0140064Y2
JPH0140064Y2 JP15157483U JP15157483U JPH0140064Y2 JP H0140064 Y2 JPH0140064 Y2 JP H0140064Y2 JP 15157483 U JP15157483 U JP 15157483U JP 15157483 U JP15157483 U JP 15157483U JP H0140064 Y2 JPH0140064 Y2 JP H0140064Y2
Authority
JP
Japan
Prior art keywords
electronic component
chamber
lens barrel
section
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15157483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6059977U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15157483U priority Critical patent/JPS6059977U/ja
Publication of JPS6059977U publication Critical patent/JPS6059977U/ja
Application granted granted Critical
Publication of JPH0140064Y2 publication Critical patent/JPH0140064Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP15157483U 1983-09-30 1983-09-30 電子部品試験装置 Granted JPS6059977U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15157483U JPS6059977U (ja) 1983-09-30 1983-09-30 電子部品試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15157483U JPS6059977U (ja) 1983-09-30 1983-09-30 電子部品試験装置

Publications (2)

Publication Number Publication Date
JPS6059977U JPS6059977U (ja) 1985-04-25
JPH0140064Y2 true JPH0140064Y2 (de) 1989-12-01

Family

ID=30335847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15157483U Granted JPS6059977U (ja) 1983-09-30 1983-09-30 電子部品試験装置

Country Status (1)

Country Link
JP (1) JPS6059977U (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4706019A (en) * 1985-11-15 1987-11-10 Fairchild Camera And Instrument Corporation Electron beam test probe system for analyzing integrated circuits
JP2854466B2 (ja) * 1992-08-28 1999-02-03 株式会社日立製作所 荷電粒子線装置

Also Published As

Publication number Publication date
JPS6059977U (ja) 1985-04-25

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