JPH0136667B2 - - Google Patents

Info

Publication number
JPH0136667B2
JPH0136667B2 JP58071107A JP7110783A JPH0136667B2 JP H0136667 B2 JPH0136667 B2 JP H0136667B2 JP 58071107 A JP58071107 A JP 58071107A JP 7110783 A JP7110783 A JP 7110783A JP H0136667 B2 JPH0136667 B2 JP H0136667B2
Authority
JP
Japan
Prior art keywords
stage
movement
shaft
sample
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58071107A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59196549A (ja
Inventor
Eisuke Kamimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP7110783A priority Critical patent/JPS59196549A/ja
Priority to US06/601,652 priority patent/US4587431A/en
Publication of JPS59196549A publication Critical patent/JPS59196549A/ja
Publication of JPH0136667B2 publication Critical patent/JPH0136667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/08—Holders for targets or for other objects to be irradiated
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Health & Medical Sciences (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Electron Tubes For Measurement (AREA)
JP7110783A 1983-04-22 1983-04-22 電子線装置等用試料装置 Granted JPS59196549A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7110783A JPS59196549A (ja) 1983-04-22 1983-04-22 電子線装置等用試料装置
US06/601,652 US4587431A (en) 1983-04-22 1984-04-18 Specimen manipulating mechanism for charged-particle beam instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7110783A JPS59196549A (ja) 1983-04-22 1983-04-22 電子線装置等用試料装置

Publications (2)

Publication Number Publication Date
JPS59196549A JPS59196549A (ja) 1984-11-07
JPH0136667B2 true JPH0136667B2 (ru) 1989-08-01

Family

ID=13450994

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7110783A Granted JPS59196549A (ja) 1983-04-22 1983-04-22 電子線装置等用試料装置

Country Status (1)

Country Link
JP (1) JPS59196549A (ru)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2627065B2 (ja) * 1987-06-22 1997-07-02 東芝機械株式会社 試料のセット装置
JP5403560B2 (ja) * 2010-11-17 2014-01-29 コリア ベイシック サイエンス インスティテュート 透過電子顕微鏡の、３方向以上から試片を観察し分析するための３軸駆動が可能な試片ホルダー
CN115200970B (zh) * 2022-09-16 2023-01-03 常州隆斯克普电子科技有限公司 一种可旋转持续制冷样品台

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2489589A1 (fr) * 1980-08-29 1982-03-05 Onera (Off Nat Aerospatiale) Dispositif de reglage de la position et de l'orientation autour d'un axe d'un porte-echantillon pour microscope electronique

Also Published As

Publication number Publication date
JPS59196549A (ja) 1984-11-07

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