JPH0133952B2 - - Google Patents

Info

Publication number
JPH0133952B2
JPH0133952B2 JP55046463A JP4646380A JPH0133952B2 JP H0133952 B2 JPH0133952 B2 JP H0133952B2 JP 55046463 A JP55046463 A JP 55046463A JP 4646380 A JP4646380 A JP 4646380A JP H0133952 B2 JPH0133952 B2 JP H0133952B2
Authority
JP
Japan
Prior art keywords
layer
conductivity type
semiconductor
crystal layer
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55046463A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56142650A (en
Inventor
Osamu Hataishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4646380A priority Critical patent/JPS56142650A/ja
Publication of JPS56142650A publication Critical patent/JPS56142650A/ja
Publication of JPH0133952B2 publication Critical patent/JPH0133952B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/01Manufacture or treatment
    • H10W10/011Manufacture or treatment of isolation regions comprising dielectric materials
    • H10W10/012Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
    • H10W10/0128Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS] comprising multiple local oxidation process steps
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W10/00Isolation regions in semiconductor bodies between components of integrated devices
    • H10W10/10Isolation regions comprising dielectric materials
    • H10W10/13Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
  • Recrystallisation Techniques (AREA)
JP4646380A 1980-04-09 1980-04-09 Semiconductor device and manufacture thereof Granted JPS56142650A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4646380A JPS56142650A (en) 1980-04-09 1980-04-09 Semiconductor device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4646380A JPS56142650A (en) 1980-04-09 1980-04-09 Semiconductor device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS56142650A JPS56142650A (en) 1981-11-07
JPH0133952B2 true JPH0133952B2 (https=) 1989-07-17

Family

ID=12747853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4646380A Granted JPS56142650A (en) 1980-04-09 1980-04-09 Semiconductor device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS56142650A (https=)

Also Published As

Publication number Publication date
JPS56142650A (en) 1981-11-07

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