JPH0132358Y2 - - Google Patents

Info

Publication number
JPH0132358Y2
JPH0132358Y2 JP1984171236U JP17123684U JPH0132358Y2 JP H0132358 Y2 JPH0132358 Y2 JP H0132358Y2 JP 1984171236 U JP1984171236 U JP 1984171236U JP 17123684 U JP17123684 U JP 17123684U JP H0132358 Y2 JPH0132358 Y2 JP H0132358Y2
Authority
JP
Japan
Prior art keywords
nozzle
processing liquid
tip
substrate
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984171236U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6186930U (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984171236U priority Critical patent/JPH0132358Y2/ja
Publication of JPS6186930U publication Critical patent/JPS6186930U/ja
Application granted granted Critical
Publication of JPH0132358Y2 publication Critical patent/JPH0132358Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
JP1984171236U 1984-11-12 1984-11-12 Expired JPH0132358Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984171236U JPH0132358Y2 (enrdf_load_html_response) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984171236U JPH0132358Y2 (enrdf_load_html_response) 1984-11-12 1984-11-12

Publications (2)

Publication Number Publication Date
JPS6186930U JPS6186930U (enrdf_load_html_response) 1986-06-07
JPH0132358Y2 true JPH0132358Y2 (enrdf_load_html_response) 1989-10-03

Family

ID=30728932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984171236U Expired JPH0132358Y2 (enrdf_load_html_response) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPH0132358Y2 (enrdf_load_html_response)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2815064B2 (ja) * 1988-05-27 1998-10-27 東京エレクトロン 株式会社 半導体ウエハに液を塗布する塗布装置及び塗布方法
JP2604010B2 (ja) * 1988-07-13 1997-04-23 株式会社日立製作所 塗布装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4281031A (en) * 1979-07-25 1981-07-28 Machine Technology, Inc. Method and apparatus for processing workpieces
JPS5632724A (en) * 1979-08-24 1981-04-02 Hitachi Ltd Photoresist applying apparatus
JPS57135066A (en) * 1981-02-14 1982-08-20 Tatsumo Kk Rotary applying machine

Also Published As

Publication number Publication date
JPS6186930U (enrdf_load_html_response) 1986-06-07

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