JPH0132039B2 - - Google Patents

Info

Publication number
JPH0132039B2
JPH0132039B2 JP57031247A JP3124782A JPH0132039B2 JP H0132039 B2 JPH0132039 B2 JP H0132039B2 JP 57031247 A JP57031247 A JP 57031247A JP 3124782 A JP3124782 A JP 3124782A JP H0132039 B2 JPH0132039 B2 JP H0132039B2
Authority
JP
Japan
Prior art keywords
weight
transported
storage block
speed
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57031247A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58149188A (ja
Inventor
Taichi Inoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Priority to JP3124782A priority Critical patent/JPS58149188A/ja
Publication of JPS58149188A publication Critical patent/JPS58149188A/ja
Publication of JPH0132039B2 publication Critical patent/JPH0132039B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Numerical Control (AREA)
JP3124782A 1982-02-26 1982-02-26 搬送ロボツト Granted JPS58149188A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3124782A JPS58149188A (ja) 1982-02-26 1982-02-26 搬送ロボツト

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3124782A JPS58149188A (ja) 1982-02-26 1982-02-26 搬送ロボツト

Publications (2)

Publication Number Publication Date
JPS58149188A JPS58149188A (ja) 1983-09-05
JPH0132039B2 true JPH0132039B2 (enrdf_load_stackoverflow) 1989-06-29

Family

ID=12326038

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3124782A Granted JPS58149188A (ja) 1982-02-26 1982-02-26 搬送ロボツト

Country Status (1)

Country Link
JP (1) JPS58149188A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6198409A (ja) * 1984-10-19 1986-05-16 Hitachi Seiki Co Ltd Nc駆動制御装置
JPS6289119A (ja) * 1985-10-16 1987-04-23 Pioneer Electronic Corp 加減速制御方法
JPH0430203A (ja) * 1990-05-25 1992-02-03 Fanuc Ltd ロボットの加減速時定数制御方法
JP2548062B2 (ja) * 1992-11-13 1996-10-30 日本エー・エス・エム株式会社 縦型熱処理装置用ロードロックチャンバー
JP2503732Y2 (ja) * 1994-04-22 1996-07-03 大日本スクリーン製造株式会社 半導体製造装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5856785A (ja) * 1981-09-30 1983-04-04 株式会社三協精機製作所 工業用ロボツトの動作制御装置

Also Published As

Publication number Publication date
JPS58149188A (ja) 1983-09-05

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