JPH0131292B2 - - Google Patents

Info

Publication number
JPH0131292B2
JPH0131292B2 JP55148585A JP14858580A JPH0131292B2 JP H0131292 B2 JPH0131292 B2 JP H0131292B2 JP 55148585 A JP55148585 A JP 55148585A JP 14858580 A JP14858580 A JP 14858580A JP H0131292 B2 JPH0131292 B2 JP H0131292B2
Authority
JP
Japan
Prior art keywords
substrate
processed
plasma
plasma etching
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55148585A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5772330A (en
Inventor
Hisao Haruyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14858580A priority Critical patent/JPS5772330A/ja
Publication of JPS5772330A publication Critical patent/JPS5772330A/ja
Publication of JPH0131292B2 publication Critical patent/JPH0131292B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • ing And Chemical Polishing (AREA)
JP14858580A 1980-10-23 1980-10-23 Plasma etching Granted JPS5772330A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14858580A JPS5772330A (en) 1980-10-23 1980-10-23 Plasma etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14858580A JPS5772330A (en) 1980-10-23 1980-10-23 Plasma etching

Publications (2)

Publication Number Publication Date
JPS5772330A JPS5772330A (en) 1982-05-06
JPH0131292B2 true JPH0131292B2 (enrdf_load_stackoverflow) 1989-06-26

Family

ID=15456029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14858580A Granted JPS5772330A (en) 1980-10-23 1980-10-23 Plasma etching

Country Status (1)

Country Link
JP (1) JPS5772330A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4694779A (en) * 1984-10-19 1987-09-22 Tetron, Inc. Reactor apparatus for semiconductor wafer processing

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311051B2 (enrdf_load_stackoverflow) * 1973-06-29 1978-04-19

Also Published As

Publication number Publication date
JPS5772330A (en) 1982-05-06

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