JPH0131173B2 - - Google Patents
Info
- Publication number
- JPH0131173B2 JPH0131173B2 JP56040554A JP4055481A JPH0131173B2 JP H0131173 B2 JPH0131173 B2 JP H0131173B2 JP 56040554 A JP56040554 A JP 56040554A JP 4055481 A JP4055481 A JP 4055481A JP H0131173 B2 JPH0131173 B2 JP H0131173B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- actinic ray
- metal
- photosensitive resin
- ray absorbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
- G03F1/58—Absorbers, e.g. of opaque materials having two or more different absorber layers, e.g. stacked multilayer absorbers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56040554A JPS57155535A (en) | 1981-03-20 | 1981-03-20 | Image forming material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56040554A JPS57155535A (en) | 1981-03-20 | 1981-03-20 | Image forming material |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57155535A JPS57155535A (en) | 1982-09-25 |
JPH0131173B2 true JPH0131173B2 (enrdf_load_html_response) | 1989-06-23 |
Family
ID=12583661
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56040554A Granted JPS57155535A (en) | 1981-03-20 | 1981-03-20 | Image forming material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57155535A (enrdf_load_html_response) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7509074B2 (en) | 2003-07-18 | 2009-03-24 | Ricoh Company, Ltd. | Method and apparatus for image forming capable of effectively reducing unevenness of density and color displacement of images |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0456479B1 (en) * | 1990-05-09 | 2001-01-31 | Canon Kabushiki Kaisha | Pattern forming process and process for preparing semiconductor device utilizing said pattern forming process |
-
1981
- 1981-03-20 JP JP56040554A patent/JPS57155535A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7509074B2 (en) | 2003-07-18 | 2009-03-24 | Ricoh Company, Ltd. | Method and apparatus for image forming capable of effectively reducing unevenness of density and color displacement of images |
Also Published As
Publication number | Publication date |
---|---|
JPS57155535A (en) | 1982-09-25 |
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